10/13/2011	10:10:10 AM	Main Vac valve closed
10/13/2011	10:18:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	10:18:22 AM	Recipe started at 10:18 AM
10/13/2011	10:18:23 AM	Helium valve closed
10/13/2011	10:18:23 AM	H2 valve closed
10/13/2011	10:18:23 AM	BCl3 valve closed
10/13/2011	10:18:23 AM	PH3 valve closed
10/13/2011	10:18:23 AM	SiCl4 pre valve closed
10/13/2011	10:18:23 AM	SiCl4 post valve closed
10/13/2011	10:18:23 AM	Main Vac valve closed
10/13/2011	10:18:23 AM	Bypass valve closed
10/13/2011	10:18:23 AM	Bubbler valve closed
10/13/2011	10:18:23 AM	Helium MFC set to  0.000000
10/13/2011	10:18:23 AM	H2 MFC set to  0.000000
10/13/2011	10:18:23 AM	BCl3 MFC set to  0.000000
10/13/2011	10:18:23 AM	PHl3 MFC set to  0.000000
10/13/2011	10:18:23 AM	SiCl4 MFC set to  0.000000
10/13/2011	10:18:23 AM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:18:23 AM	Tube furnace set to 0
10/13/2011	10:18:26 AM	H2 valve closed
10/13/2011	10:18:26 AM	BCl3 valve closed
10/13/2011	10:18:26 AM	PH3 valve closed
10/13/2011	10:18:26 AM	SiCl4 pre valve closed
10/13/2011	10:18:26 AM	SiCl4 post valve closed
10/13/2011	10:18:26 AM	Main Vac valve closed
10/13/2011	10:18:26 AM	Bypass valve closed
10/13/2011	10:18:26 AM	Bubbler valve closed
10/13/2011	10:18:26 AM	Helium valve opened
10/13/2011	10:18:26 AM	Helium MFC set to  500.000000
10/13/2011	10:18:26 AM	H2 MFC set to  0.000000
10/13/2011	10:18:26 AM	BCl3 MFC set to  0.000000
10/13/2011	10:18:26 AM	PHl3 MFC set to  0.000000
10/13/2011	10:18:26 AM	SiCl4 MFC set to  0.000000
10/13/2011	10:18:26 AM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:18:26 AM	Tube furnace set to 0
10/13/2011	10:18:32 AM	Run aborted at 10:18 AM
10/13/2011	10:18:32 AM	Helium valve closed
10/13/2011	10:18:32 AM	H2 valve closed
10/13/2011	10:18:32 AM	BCl3 valve closed
10/13/2011	10:18:32 AM	PH3 valve closed
10/13/2011	10:18:32 AM	SiCl4 pre valve closed
10/13/2011	10:18:32 AM	SiCl4 post valve closed
10/13/2011	10:18:32 AM	Bypass valve closed
10/13/2011	10:18:32 AM	Main Vac valve closed
10/13/2011	10:18:32 AM	Bubbler valve closed
10/13/2011	10:18:32 AM	Helium MFC set to  0.000000
10/13/2011	10:18:32 AM	H2 MFC set to  0.000000
10/13/2011	10:18:32 AM	BCl3 MFC set to  0.000000
10/13/2011	10:18:32 AM	PHl3 MFC set to  0.000000
10/13/2011	10:18:32 AM	SiCl4 MFC set to  0.000000
10/13/2011	10:18:33 AM	Tube furnace set to 0
10/13/2011	10:18:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	10:18:56 AM	Bypass valve opened
10/13/2011	10:19:22 AM	H2 MFC set to  500.000000
10/13/2011	10:19:25 AM	H2 valve opened
10/13/2011	10:19:25 AM	H2 valve closed
10/13/2011	10:19:31 AM	H2 valve opened
10/13/2011	10:19:47 AM	H2 MFC set to  200.000000
10/13/2011	10:21:08 AM	H2 MFC set to  300.000000
10/13/2011	10:31:24 AM	H2 MFC set to  500.000000
10/13/2011	10:31:32 AM	Bypass valve closed
10/13/2011	10:31:33 AM	Main Vac valve opened
10/13/2011	11:37:35 AM	Main Vac valve closed
10/13/2011	11:37:51 AM	H2 MFC set to  0.000000
10/13/2011	11:37:52 AM	H2 valve closed
10/13/2011	11:42:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	11:42:17 AM	Recipe started at 11:42 AM
10/13/2011	11:42:17 AM	Helium valve closed
10/13/2011	11:42:17 AM	H2 valve closed
10/13/2011	11:42:17 AM	BCl3 valve closed
10/13/2011	11:42:17 AM	PH3 valve closed
10/13/2011	11:42:17 AM	SiCl4 pre valve closed
10/13/2011	11:42:17 AM	SiCl4 post valve closed
10/13/2011	11:42:17 AM	Main Vac valve closed
10/13/2011	11:42:17 AM	Bypass valve closed
10/13/2011	11:42:17 AM	Bubbler valve closed
10/13/2011	11:42:17 AM	Helium MFC set to  0.000000
10/13/2011	11:42:17 AM	H2 MFC set to  0.000000
10/13/2011	11:42:17 AM	BCl3 MFC set to  0.000000
10/13/2011	11:42:17 AM	PHl3 MFC set to  0.000000
10/13/2011	11:42:17 AM	SiCl4 MFC set to  0.000000
10/13/2011	11:42:17 AM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:42:17 AM	Tube furnace set to 0
10/13/2011	11:42:20 AM	H2 valve closed
10/13/2011	11:42:20 AM	BCl3 valve closed
10/13/2011	11:42:20 AM	PH3 valve closed
10/13/2011	11:42:20 AM	SiCl4 pre valve closed
10/13/2011	11:42:20 AM	SiCl4 post valve closed
10/13/2011	11:42:20 AM	Main Vac valve closed
10/13/2011	11:42:20 AM	Bypass valve closed
10/13/2011	11:42:20 AM	Bubbler valve closed
10/13/2011	11:42:20 AM	Helium valve opened
10/13/2011	11:42:20 AM	Helium MFC set to  500.000000
10/13/2011	11:42:20 AM	H2 MFC set to  0.000000
10/13/2011	11:42:20 AM	BCl3 MFC set to  0.000000
10/13/2011	11:42:20 AM	PHl3 MFC set to  0.000000
10/13/2011	11:42:20 AM	SiCl4 MFC set to  0.000000
10/13/2011	11:42:20 AM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:42:20 AM	Tube furnace set to 0
10/13/2011	11:43:37 AM	Helium valve closed
10/13/2011	11:43:37 AM	H2 valve closed
10/13/2011	11:43:37 AM	BCl3 valve closed
10/13/2011	11:43:37 AM	PH3 valve closed
10/13/2011	11:43:37 AM	SiCl4 pre valve closed
10/13/2011	11:43:37 AM	SiCl4 post valve closed
10/13/2011	11:43:37 AM	Main Vac valve closed
10/13/2011	11:43:37 AM	Bypass valve closed
10/13/2011	11:43:37 AM	Bubbler valve closed
10/13/2011	11:43:37 AM	Helium MFC set to  0.000000
10/13/2011	11:43:37 AM	H2 MFC set to  0.000000
10/13/2011	11:43:37 AM	BCl3 MFC set to  0.000000
10/13/2011	11:43:37 AM	PHl3 MFC set to  0.000000
10/13/2011	11:43:37 AM	SiCl4 MFC set to  0.000000
10/13/2011	11:43:37 AM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:43:37 AM	Tube furnace set to 0
10/13/2011	11:43:38 AM	Run finished at 11:43 AM
10/13/2011	11:43:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	12:05:07 PM	SiCl4 MFC set to  50.000000
10/13/2011	12:05:10 PM	SiCl4 pre valve opened
10/13/2011	12:05:12 PM	SiCl4 post valve opened
10/13/2011	12:05:25 PM	Bubbler valve opened
10/13/2011	12:06:19 PM	Helium MFC set to  0.000000
10/13/2011	12:12:32 PM	SiCl4 MFC set to  0.000000
10/13/2011	12:12:33 PM	SiCl4 pre valve closed
10/13/2011	12:12:34 PM	SiCl4 post valve closed
10/13/2011	12:12:35 PM	Bubbler valve closed
10/13/2011	12:13:22 PM	Bypass valve opened
10/13/2011	12:13:40 PM	SiCl4 post valve opened
10/13/2011	12:15:01 PM	Bypass valve closed
10/13/2011	12:15:04 PM	Main Vac valve opened
10/13/2011	12:15:04 PM	Main Vac valve closed
10/13/2011	12:15:08 PM	Main Vac valve opened
10/13/2011	1:58:35 PM	Main Vac valve closed
10/13/2011	2:09:17 PM	Main Vac valve opened
10/13/2011	2:09:54 PM	Main Vac valve closed
10/13/2011	2:10:35 PM	Main Vac valve opened
10/13/2011	2:20:46 PM	Main Vac valve closed
10/13/2011	2:31:51 PM	Main Vac valve opened
10/13/2011	2:34:50 PM	Main Vac valve closed
10/13/2011	2:45:31 PM	Main Vac valve opened
10/13/2011	2:48:19 PM	Main Vac valve closed
10/13/2011	2:52:16 PM	SiCl4 pre valve opened
10/13/2011	2:52:16 PM	SiCl4 pre valve closed
10/13/2011	3:02:36 PM	SiCl4 pre valve opened
10/13/2011	3:02:36 PM	SiCl4 pre valve closed
10/13/2011	3:03:25 PM	Helium valve opened
10/13/2011	3:03:25 PM	Helium valve closed
10/13/2011	3:08:33 PM	SiCl4 post valve closed
10/13/2011	3:09:40 PM	H2 valve opened
10/13/2011	3:09:40 PM	H2 valve closed
10/13/2011	3:09:53 PM	H2 MFC set to  0.000000
10/13/2011	3:09:55 PM	H2 valve opened
10/13/2011	3:09:55 PM	H2 valve closed
10/13/2011	3:18:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	3:18:07 PM	Recipe started at 3:18 PM
10/13/2011	3:18:07 PM	Helium valve closed
10/13/2011	3:18:07 PM	H2 valve closed
10/13/2011	3:18:07 PM	BCl3 valve closed
10/13/2011	3:18:07 PM	PH3 valve closed
10/13/2011	3:18:07 PM	SiCl4 pre valve closed
10/13/2011	3:18:07 PM	SiCl4 post valve closed
10/13/2011	3:18:07 PM	Main Vac valve closed
10/13/2011	3:18:07 PM	Bypass valve closed
10/13/2011	3:18:07 PM	Bubbler valve closed
10/13/2011	3:18:07 PM	Helium MFC set to  0.000000
10/13/2011	3:18:07 PM	H2 MFC set to  0.000000
10/13/2011	3:18:07 PM	BCl3 MFC set to  0.000000
10/13/2011	3:18:07 PM	PHl3 MFC set to  0.000000
10/13/2011	3:18:07 PM	SiCl4 MFC set to  0.000000
10/13/2011	3:18:07 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	3:18:07 PM	Tube furnace set to 0
10/13/2011	3:18:10 PM	H2 valve closed
10/13/2011	3:18:10 PM	BCl3 valve closed
10/13/2011	3:18:10 PM	PH3 valve closed
10/13/2011	3:18:10 PM	SiCl4 pre valve closed
10/13/2011	3:18:10 PM	SiCl4 post valve closed
10/13/2011	3:18:10 PM	Main Vac valve closed
10/13/2011	3:18:10 PM	Bypass valve closed
10/13/2011	3:18:10 PM	Bubbler valve closed
10/13/2011	3:18:10 PM	Helium valve opened
10/13/2011	3:18:10 PM	Helium MFC set to  500.000000
10/13/2011	3:18:10 PM	H2 MFC set to  0.000000
10/13/2011	3:18:10 PM	BCl3 MFC set to  0.000000
10/13/2011	3:18:10 PM	PHl3 MFC set to  0.000000
10/13/2011	3:18:10 PM	SiCl4 MFC set to  0.000000
10/13/2011	3:18:10 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	3:18:10 PM	Tube furnace set to 0
10/13/2011	3:19:26 PM	Helium valve closed
10/13/2011	3:19:26 PM	H2 valve closed
10/13/2011	3:19:26 PM	BCl3 valve closed
10/13/2011	3:19:26 PM	PH3 valve closed
10/13/2011	3:19:26 PM	SiCl4 pre valve closed
10/13/2011	3:19:26 PM	SiCl4 post valve closed
10/13/2011	3:19:26 PM	Main Vac valve closed
10/13/2011	3:19:26 PM	Bypass valve closed
10/13/2011	3:19:26 PM	Bubbler valve closed
10/13/2011	3:19:26 PM	Helium MFC set to  0.000000
10/13/2011	3:19:26 PM	H2 MFC set to  0.000000
10/13/2011	3:19:26 PM	BCl3 MFC set to  0.000000
10/13/2011	3:19:26 PM	PHl3 MFC set to  0.000000
10/13/2011	3:19:26 PM	SiCl4 MFC set to  0.000000
10/13/2011	3:19:26 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	3:19:26 PM	Tube furnace set to 0
10/13/2011	3:19:27 PM	Run finished at 3:19 PM
10/13/2011	3:19:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	3:20:41 PM	SiCl4 post valve opened
10/13/2011	3:20:49 PM	SiCl4 MFC set to  20.000000
10/13/2011	3:20:50 PM	SiCl4 pre valve opened
10/13/2011	3:21:03 PM	SiCl4 MFC set to  50.000000
10/13/2011	3:21:20 PM	SiCl4 MFC set to  50.000000
10/13/2011	3:21:38 PM	SiCl4 MFC set to  0.000000
10/13/2011	3:21:41 PM	SiCl4 pre valve closed
10/13/2011	3:21:42 PM	SiCl4 post valve closed
10/13/2011	3:22:53 PM	SiCl4 MFC set to  50.000000
10/13/2011	3:22:54 PM	SiCl4 pre valve opened
10/13/2011	3:22:54 PM	SiCl4 post valve opened
10/13/2011	3:22:57 PM	Bubbler valve opened
10/13/2011	3:23:25 PM	SiCl4 MFC set to  0.000000
10/13/2011	3:23:26 PM	SiCl4 pre valve closed
10/13/2011	3:23:27 PM	SiCl4 post valve closed
10/13/2011	3:23:32 PM	Bubbler valve closed
10/13/2011	3:23:52 PM	Helium MFC set to  500.000000
10/13/2011	3:23:53 PM	Helium valve opened
10/13/2011	3:23:54 PM	Bubbler valve opened
10/13/2011	3:31:04 PM	Helium MFC set to  0.000000
10/13/2011	3:31:05 PM	Bubbler valve closed
10/13/2011	3:31:07 PM	Helium valve closed
10/13/2011	3:31:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2011	3:31:14 PM	Recipe started at 3:31 PM
10/13/2011	3:31:14 PM	Helium valve closed
10/13/2011	3:31:14 PM	H2 valve closed
10/13/2011	3:31:14 PM	BCl3 valve closed
10/13/2011	3:31:14 PM	PH3 valve closed
10/13/2011	3:31:14 PM	SiCl4 pre valve closed
10/13/2011	3:31:14 PM	SiCl4 post valve closed
10/13/2011	3:31:14 PM	Main Vac valve closed
10/13/2011	3:31:14 PM	Bubbler valve closed
10/13/2011	3:31:14 PM	Bypass valve opened
10/13/2011	3:31:14 PM	Helium MFC set to  0.000000
10/13/2011	3:31:14 PM	H2 MFC set to  0.000000
10/13/2011	3:31:14 PM	BCl3 MFC set to  0.000000
10/13/2011	3:31:14 PM	PHl3 MFC set to  0.000000
10/13/2011	3:31:14 PM	SiCl4 MFC set to  0.000000
10/13/2011	3:31:14 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	3:31:15 PM	Tube furnace set to 0
10/13/2011	3:32:22 PM	Helium valve closed
10/13/2011	3:32:22 PM	H2 valve closed
10/13/2011	3:32:22 PM	BCl3 valve closed
10/13/2011	3:32:22 PM	PH3 valve closed
10/13/2011	3:32:22 PM	SiCl4 pre valve closed
10/13/2011	3:32:22 PM	SiCl4 post valve closed
10/13/2011	3:32:22 PM	Main Vac valve closed
10/13/2011	3:32:22 PM	Bubbler valve closed
10/13/2011	3:32:22 PM	Bypass valve opened
10/13/2011	3:32:22 PM	Helium MFC set to  0.000000
10/13/2011	3:32:22 PM	H2 MFC set to  0.000000
10/13/2011	3:32:22 PM	BCl3 MFC set to  0.000000
10/13/2011	3:32:22 PM	PHl3 MFC set to  0.000000
10/13/2011	3:32:22 PM	SiCl4 MFC set to  0.000000
10/13/2011	3:32:22 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	3:32:22 PM	Tube furnace set to 0
10/13/2011	3:33:22 PM	Helium valve closed
10/13/2011	3:33:22 PM	H2 valve closed
10/13/2011	3:33:22 PM	BCl3 valve closed
10/13/2011	3:33:22 PM	PH3 valve closed
10/13/2011	3:33:22 PM	SiCl4 pre valve closed
10/13/2011	3:33:22 PM	SiCl4 post valve closed
10/13/2011	3:33:22 PM	Bypass valve closed
10/13/2011	3:33:22 PM	Bubbler valve closed
10/13/2011	3:33:22 PM	Main Vac valve opened
10/13/2011	3:33:22 PM	Helium MFC set to  0.000000
10/13/2011	3:33:22 PM	H2 MFC set to  0.000000
10/13/2011	3:33:22 PM	BCl3 MFC set to  0.000000
10/13/2011	3:33:22 PM	PHl3 MFC set to  0.000000
10/13/2011	3:33:22 PM	SiCl4 MFC set to  0.000000
10/13/2011	3:33:22 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	3:33:22 PM	Tube furnace set to 0
10/13/2011	3:33:23 PM	Run finished at 3:33 PM
10/13/2011	3:33:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2011	3:38:51 PM	Main Vac valve closed
10/13/2011	3:39:26 PM	Main Vac valve opened
10/13/2011	3:40:38 PM	SiCl4 post valve opened
10/13/2011	3:40:38 PM	SiCl4 post valve closed
10/13/2011	3:44:47 PM	Main Vac valve closed
10/13/2011	3:47:06 PM	SiCl4 post valve opened
10/13/2011	3:47:06 PM	SiCl4 post valve closed
10/13/2011	3:50:46 PM	Bypass valve opened
10/13/2011	3:51:17 PM	Bypass valve closed
10/13/2011	3:52:00 PM	Bypass valve opened
10/13/2011	3:52:43 PM	Bypass valve closed
10/13/2011	3:52:54 PM	Bypass valve opened
10/13/2011	3:53:19 PM	Bypass valve closed
10/13/2011	3:54:03 PM	Bypass valve opened
10/13/2011	3:55:26 PM	Bypass valve closed
10/13/2011	3:57:29 PM	Main Vac valve opened
10/13/2011	3:57:40 PM	Main Vac valve closed
10/13/2011	3:57:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	3:57:49 PM	Recipe started at 3:57 PM
10/13/2011	3:57:49 PM	Helium valve closed
10/13/2011	3:57:49 PM	H2 valve closed
10/13/2011	3:57:49 PM	BCl3 valve closed
10/13/2011	3:57:49 PM	PH3 valve closed
10/13/2011	3:57:49 PM	SiCl4 pre valve closed
10/13/2011	3:57:49 PM	SiCl4 post valve closed
10/13/2011	3:57:49 PM	Main Vac valve closed
10/13/2011	3:57:49 PM	Bypass valve closed
10/13/2011	3:57:49 PM	Bubbler valve closed
10/13/2011	3:57:49 PM	Helium MFC set to  0.000000
10/13/2011	3:57:49 PM	H2 MFC set to  0.000000
10/13/2011	3:57:49 PM	BCl3 MFC set to  0.000000
10/13/2011	3:57:49 PM	PHl3 MFC set to  0.000000
10/13/2011	3:57:49 PM	SiCl4 MFC set to  0.000000
10/13/2011	3:57:49 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	3:57:49 PM	Tube furnace set to 0
10/13/2011	3:57:52 PM	H2 valve closed
10/13/2011	3:57:52 PM	BCl3 valve closed
10/13/2011	3:57:52 PM	PH3 valve closed
10/13/2011	3:57:52 PM	SiCl4 pre valve closed
10/13/2011	3:57:52 PM	SiCl4 post valve closed
10/13/2011	3:57:52 PM	Main Vac valve closed
10/13/2011	3:57:52 PM	Bypass valve closed
10/13/2011	3:57:52 PM	Bubbler valve closed
10/13/2011	3:57:52 PM	Helium valve opened
10/13/2011	3:57:52 PM	Helium MFC set to  500.000000
10/13/2011	3:57:52 PM	H2 MFC set to  0.000000
10/13/2011	3:57:52 PM	BCl3 MFC set to  0.000000
10/13/2011	3:57:52 PM	PHl3 MFC set to  0.000000
10/13/2011	3:57:52 PM	SiCl4 MFC set to  0.000000
10/13/2011	3:57:52 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	3:57:53 PM	Tube furnace set to 0
10/13/2011	3:59:09 PM	Helium valve closed
10/13/2011	3:59:09 PM	H2 valve closed
10/13/2011	3:59:09 PM	BCl3 valve closed
10/13/2011	3:59:09 PM	PH3 valve closed
10/13/2011	3:59:09 PM	SiCl4 pre valve closed
10/13/2011	3:59:09 PM	SiCl4 post valve closed
10/13/2011	3:59:09 PM	Main Vac valve closed
10/13/2011	3:59:09 PM	Bypass valve closed
10/13/2011	3:59:09 PM	Bubbler valve closed
10/13/2011	3:59:09 PM	Helium MFC set to  0.000000
10/13/2011	3:59:09 PM	H2 MFC set to  0.000000
10/13/2011	3:59:09 PM	BCl3 MFC set to  0.000000
10/13/2011	3:59:09 PM	PHl3 MFC set to  0.000000
10/13/2011	3:59:09 PM	SiCl4 MFC set to  0.000000
10/13/2011	3:59:09 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	3:59:09 PM	Tube furnace set to 0
10/13/2011	3:59:10 PM	Run finished at 3:59 PM
10/13/2011	3:59:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	4:02:03 PM	Bypass valve opened
10/13/2011	4:03:13 PM	Bypass valve closed
10/13/2011	4:03:15 PM	Bypass valve opened
10/13/2011	4:03:24 PM	Bypass valve closed
10/13/2011	4:03:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	4:03:27 PM	Recipe started at 4:03 PM
10/13/2011	4:03:27 PM	Helium valve closed
10/13/2011	4:03:27 PM	H2 valve closed
10/13/2011	4:03:27 PM	BCl3 valve closed
10/13/2011	4:03:27 PM	PH3 valve closed
10/13/2011	4:03:27 PM	SiCl4 pre valve closed
10/13/2011	4:03:27 PM	SiCl4 post valve closed
10/13/2011	4:03:27 PM	Main Vac valve closed
10/13/2011	4:03:27 PM	Bypass valve closed
10/13/2011	4:03:27 PM	Bubbler valve closed
10/13/2011	4:03:27 PM	Helium MFC set to  0.000000
10/13/2011	4:03:27 PM	H2 MFC set to  0.000000
10/13/2011	4:03:27 PM	BCl3 MFC set to  0.000000
10/13/2011	4:03:27 PM	PHl3 MFC set to  0.000000
10/13/2011	4:03:27 PM	SiCl4 MFC set to  0.000000
10/13/2011	4:03:27 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	4:03:27 PM	Tube furnace set to 0
10/13/2011	4:03:30 PM	H2 valve closed
10/13/2011	4:03:30 PM	BCl3 valve closed
10/13/2011	4:03:30 PM	PH3 valve closed
10/13/2011	4:03:30 PM	SiCl4 pre valve closed
10/13/2011	4:03:30 PM	SiCl4 post valve closed
10/13/2011	4:03:30 PM	Main Vac valve closed
10/13/2011	4:03:30 PM	Bypass valve closed
10/13/2011	4:03:30 PM	Bubbler valve closed
10/13/2011	4:03:30 PM	Helium valve opened
10/13/2011	4:03:30 PM	Helium MFC set to  500.000000
10/13/2011	4:03:30 PM	H2 MFC set to  0.000000
10/13/2011	4:03:30 PM	BCl3 MFC set to  0.000000
10/13/2011	4:03:30 PM	PHl3 MFC set to  0.000000
10/13/2011	4:03:30 PM	SiCl4 MFC set to  0.000000
10/13/2011	4:03:30 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	4:03:30 PM	Tube furnace set to 0
10/13/2011	4:04:46 PM	Helium valve closed
10/13/2011	4:04:46 PM	H2 valve closed
10/13/2011	4:04:46 PM	BCl3 valve closed
10/13/2011	4:04:46 PM	PH3 valve closed
10/13/2011	4:04:46 PM	SiCl4 pre valve closed
10/13/2011	4:04:46 PM	SiCl4 post valve closed
10/13/2011	4:04:46 PM	Main Vac valve closed
10/13/2011	4:04:46 PM	Bypass valve closed
10/13/2011	4:04:46 PM	Bubbler valve closed
10/13/2011	4:04:46 PM	Helium MFC set to  0.000000
10/13/2011	4:04:46 PM	H2 MFC set to  0.000000
10/13/2011	4:04:46 PM	BCl3 MFC set to  0.000000
10/13/2011	4:04:46 PM	PHl3 MFC set to  0.000000
10/13/2011	4:04:46 PM	SiCl4 MFC set to  0.000000
10/13/2011	4:04:46 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	4:04:47 PM	Tube furnace set to 0
10/13/2011	4:04:48 PM	Run finished at 4:04 PM
10/13/2011	4:04:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	4:14:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2011	4:14:29 PM	Recipe started at 4:14 PM
10/13/2011	4:14:29 PM	Helium valve closed
10/13/2011	4:14:29 PM	H2 valve closed
10/13/2011	4:14:29 PM	BCl3 valve closed
10/13/2011	4:14:29 PM	PH3 valve closed
10/13/2011	4:14:29 PM	SiCl4 pre valve closed
10/13/2011	4:14:29 PM	SiCl4 post valve closed
10/13/2011	4:14:29 PM	Main Vac valve closed
10/13/2011	4:14:29 PM	Bubbler valve closed
10/13/2011	4:14:29 PM	Bypass valve opened
10/13/2011	4:14:29 PM	Helium MFC set to  0.000000
10/13/2011	4:14:29 PM	H2 MFC set to  0.000000
10/13/2011	4:14:29 PM	BCl3 MFC set to  0.000000
10/13/2011	4:14:29 PM	PHl3 MFC set to  0.000000
10/13/2011	4:14:29 PM	SiCl4 MFC set to  0.000000
10/13/2011	4:14:29 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	4:14:29 PM	Tube furnace set to 0
10/13/2011	4:15:32 PM	Helium valve closed
10/13/2011	4:15:32 PM	H2 valve closed
10/13/2011	4:15:32 PM	BCl3 valve closed
10/13/2011	4:15:32 PM	PH3 valve closed
10/13/2011	4:15:32 PM	SiCl4 pre valve closed
10/13/2011	4:15:32 PM	SiCl4 post valve closed
10/13/2011	4:15:32 PM	Main Vac valve closed
10/13/2011	4:15:32 PM	Bubbler valve closed
10/13/2011	4:15:32 PM	Bypass valve opened
10/13/2011	4:15:32 PM	Helium MFC set to  0.000000
10/13/2011	4:15:32 PM	H2 MFC set to  0.000000
10/13/2011	4:15:32 PM	BCl3 MFC set to  0.000000
10/13/2011	4:15:32 PM	PHl3 MFC set to  0.000000
10/13/2011	4:15:32 PM	SiCl4 MFC set to  0.000000
10/13/2011	4:15:32 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	4:15:32 PM	Tube furnace set to 0
10/13/2011	4:16:32 PM	Helium valve closed
10/13/2011	4:16:32 PM	H2 valve closed
10/13/2011	4:16:32 PM	BCl3 valve closed
10/13/2011	4:16:32 PM	PH3 valve closed
10/13/2011	4:16:32 PM	SiCl4 pre valve closed
10/13/2011	4:16:32 PM	SiCl4 post valve closed
10/13/2011	4:16:32 PM	Bypass valve closed
10/13/2011	4:16:32 PM	Bubbler valve closed
10/13/2011	4:16:32 PM	Main Vac valve opened
10/13/2011	4:16:32 PM	Helium MFC set to  0.000000
10/13/2011	4:16:32 PM	H2 MFC set to  0.000000
10/13/2011	4:16:32 PM	BCl3 MFC set to  0.000000
10/13/2011	4:16:32 PM	PHl3 MFC set to  0.000000
10/13/2011	4:16:32 PM	SiCl4 MFC set to  0.000000
10/13/2011	4:16:32 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	4:16:32 PM	Tube furnace set to 0
10/13/2011	4:16:33 PM	Run finished at 4:16 PM
10/13/2011	4:16:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2011	5:55:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	5:55:13 PM	Recipe started at 5:55 PM
10/13/2011	5:55:13 PM	Helium valve closed
10/13/2011	5:55:13 PM	H2 valve closed
10/13/2011	5:55:13 PM	BCl3 valve closed
10/13/2011	5:55:13 PM	PH3 valve closed
10/13/2011	5:55:13 PM	SiCl4 pre valve closed
10/13/2011	5:55:13 PM	SiCl4 post valve closed
10/13/2011	5:55:13 PM	Main Vac valve closed
10/13/2011	5:55:13 PM	Bypass valve closed
10/13/2011	5:55:13 PM	Bubbler valve closed
10/13/2011	5:55:13 PM	Helium MFC set to  0.000000
10/13/2011	5:55:13 PM	H2 MFC set to  0.000000
10/13/2011	5:55:13 PM	BCl3 MFC set to  0.000000
10/13/2011	5:55:13 PM	PHl3 MFC set to  0.000000
10/13/2011	5:55:13 PM	SiCl4 MFC set to  0.000000
10/13/2011	5:55:13 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	5:55:13 PM	Tube furnace set to 0
10/13/2011	5:55:16 PM	H2 valve closed
10/13/2011	5:55:16 PM	BCl3 valve closed
10/13/2011	5:55:16 PM	PH3 valve closed
10/13/2011	5:55:16 PM	SiCl4 pre valve closed
10/13/2011	5:55:16 PM	SiCl4 post valve closed
10/13/2011	5:55:16 PM	Main Vac valve closed
10/13/2011	5:55:16 PM	Bypass valve closed
10/13/2011	5:55:16 PM	Bubbler valve closed
10/13/2011	5:55:16 PM	Helium valve opened
10/13/2011	5:55:16 PM	Helium MFC set to  500.000000
10/13/2011	5:55:16 PM	H2 MFC set to  0.000000
10/13/2011	5:55:16 PM	BCl3 MFC set to  0.000000
10/13/2011	5:55:16 PM	PHl3 MFC set to  0.000000
10/13/2011	5:55:16 PM	SiCl4 MFC set to  0.000000
10/13/2011	5:55:16 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	5:55:17 PM	Tube furnace set to 0
10/13/2011	5:56:23 PM	Helium valve closed
10/13/2011	5:56:23 PM	H2 valve closed
10/13/2011	5:56:23 PM	BCl3 valve closed
10/13/2011	5:56:23 PM	PH3 valve closed
10/13/2011	5:56:23 PM	SiCl4 pre valve closed
10/13/2011	5:56:23 PM	SiCl4 post valve closed
10/13/2011	5:56:23 PM	Main Vac valve closed
10/13/2011	5:56:23 PM	Bypass valve closed
10/13/2011	5:56:23 PM	Bubbler valve closed
10/13/2011	5:56:23 PM	Helium MFC set to  0.000000
10/13/2011	5:56:23 PM	H2 MFC set to  0.000000
10/13/2011	5:56:23 PM	BCl3 MFC set to  0.000000
10/13/2011	5:56:23 PM	PHl3 MFC set to  0.000000
10/13/2011	5:56:23 PM	SiCl4 MFC set to  0.000000
10/13/2011	5:56:23 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	5:56:24 PM	Tube furnace set to 0
10/13/2011	5:56:25 PM	Run finished at 5:56 PM
10/13/2011	5:56:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	6:07:29 PM	Recipe started at 6:07 PM
10/13/2011	6:07:29 PM	Helium valve closed
10/13/2011	6:07:29 PM	H2 valve closed
10/13/2011	6:07:29 PM	BCl3 valve closed
10/13/2011	6:07:29 PM	PH3 valve closed
10/13/2011	6:07:29 PM	SiCl4 pre valve closed
10/13/2011	6:07:29 PM	SiCl4 post valve closed
10/13/2011	6:07:29 PM	Main Vac valve closed
10/13/2011	6:07:29 PM	Bubbler valve closed
10/13/2011	6:07:29 PM	Bypass valve opened
10/13/2011	6:07:29 PM	Helium MFC set to  0.000000
10/13/2011	6:07:29 PM	H2 MFC set to  0.000000
10/13/2011	6:07:29 PM	BCl3 MFC set to  0.000000
10/13/2011	6:07:29 PM	PHl3 MFC set to  0.000000
10/13/2011	6:07:29 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:07:29 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:07:29 PM	Tube furnace set to 0
10/13/2011	6:08:41 PM	Helium valve closed
10/13/2011	6:08:41 PM	H2 valve closed
10/13/2011	6:08:41 PM	BCl3 valve closed
10/13/2011	6:08:41 PM	PH3 valve closed
10/13/2011	6:08:41 PM	SiCl4 pre valve closed
10/13/2011	6:08:41 PM	SiCl4 post valve closed
10/13/2011	6:08:41 PM	Main Vac valve closed
10/13/2011	6:08:41 PM	Bubbler valve closed
10/13/2011	6:08:41 PM	Bypass valve opened
10/13/2011	6:08:41 PM	Helium MFC set to  0.000000
10/13/2011	6:08:41 PM	H2 MFC set to  0.000000
10/13/2011	6:08:41 PM	BCl3 MFC set to  0.000000
10/13/2011	6:08:41 PM	PHl3 MFC set to  0.000000
10/13/2011	6:08:41 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:08:41 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:08:41 PM	Tube furnace set to 0
10/13/2011	6:09:11 PM	Helium valve closed
10/13/2011	6:09:11 PM	H2 valve closed
10/13/2011	6:09:11 PM	BCl3 valve closed
10/13/2011	6:09:11 PM	PH3 valve closed
10/13/2011	6:09:11 PM	SiCl4 pre valve closed
10/13/2011	6:09:11 PM	SiCl4 post valve closed
10/13/2011	6:09:11 PM	Bypass valve closed
10/13/2011	6:09:11 PM	Bubbler valve closed
10/13/2011	6:09:11 PM	Main Vac valve opened
10/13/2011	6:09:11 PM	Helium MFC set to  0.000000
10/13/2011	6:09:11 PM	H2 MFC set to  0.000000
10/13/2011	6:09:11 PM	BCl3 MFC set to  0.000000
10/13/2011	6:09:11 PM	PHl3 MFC set to  0.000000
10/13/2011	6:09:11 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:09:11 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:09:11 PM	Tube furnace set to 0
10/13/2011	6:39:11 PM	H2 valve closed
10/13/2011	6:39:11 PM	BCl3 valve closed
10/13/2011	6:39:11 PM	PH3 valve closed
10/13/2011	6:39:11 PM	SiCl4 pre valve closed
10/13/2011	6:39:11 PM	SiCl4 post valve closed
10/13/2011	6:39:11 PM	Bypass valve closed
10/13/2011	6:39:11 PM	Bubbler valve closed
10/13/2011	6:39:11 PM	Helium valve opened
10/13/2011	6:39:11 PM	Main Vac valve opened
10/13/2011	6:39:11 PM	Helium MFC set to  20.000000
10/13/2011	6:39:11 PM	H2 MFC set to  0.000000
10/13/2011	6:39:11 PM	BCl3 MFC set to  0.000000
10/13/2011	6:39:11 PM	PHl3 MFC set to  0.000000
10/13/2011	6:39:11 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:39:11 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:39:11 PM	Tube furnace set to 0
10/13/2011	6:39:41 PM	Helium valve closed
10/13/2011	6:39:42 PM	H2 valve closed
10/13/2011	6:39:42 PM	BCl3 valve closed
10/13/2011	6:39:42 PM	PH3 valve closed
10/13/2011	6:39:42 PM	SiCl4 pre valve closed
10/13/2011	6:39:42 PM	SiCl4 post valve closed
10/13/2011	6:39:42 PM	Bypass valve closed
10/13/2011	6:39:42 PM	Bubbler valve closed
10/13/2011	6:39:42 PM	Main Vac valve opened
10/13/2011	6:39:42 PM	Helium MFC set to  0.000000
10/13/2011	6:39:42 PM	H2 MFC set to  0.000000
10/13/2011	6:39:42 PM	BCl3 MFC set to  0.000000
10/13/2011	6:39:42 PM	PHl3 MFC set to  0.000000
10/13/2011	6:39:42 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:39:42 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:39:42 PM	Tube furnace set to 0
10/13/2011	6:40:12 PM	H2 valve closed
10/13/2011	6:40:12 PM	BCl3 valve closed
10/13/2011	6:40:12 PM	PH3 valve closed
10/13/2011	6:40:12 PM	SiCl4 pre valve closed
10/13/2011	6:40:12 PM	SiCl4 post valve closed
10/13/2011	6:40:12 PM	Bypass valve closed
10/13/2011	6:40:12 PM	Bubbler valve closed
10/13/2011	6:40:12 PM	Helium valve opened
10/13/2011	6:40:12 PM	Main Vac valve opened
10/13/2011	6:40:12 PM	Helium MFC set to  20.000000
10/13/2011	6:40:12 PM	H2 MFC set to  0.000000
10/13/2011	6:40:12 PM	BCl3 MFC set to  0.000000
10/13/2011	6:40:12 PM	PHl3 MFC set to  0.000000
10/13/2011	6:40:12 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:40:12 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:40:12 PM	Tube furnace set to 0
10/13/2011	6:40:42 PM	Helium valve closed
10/13/2011	6:40:42 PM	H2 valve closed
10/13/2011	6:40:42 PM	BCl3 valve closed
10/13/2011	6:40:42 PM	PH3 valve closed
10/13/2011	6:40:42 PM	SiCl4 pre valve closed
10/13/2011	6:40:42 PM	SiCl4 post valve closed
10/13/2011	6:40:42 PM	Bypass valve closed
10/13/2011	6:40:42 PM	Bubbler valve closed
10/13/2011	6:40:42 PM	Main Vac valve opened
10/13/2011	6:40:42 PM	Helium MFC set to  0.000000
10/13/2011	6:40:42 PM	H2 MFC set to  0.000000
10/13/2011	6:40:42 PM	BCl3 MFC set to  0.000000
10/13/2011	6:40:42 PM	PHl3 MFC set to  0.000000
10/13/2011	6:40:42 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:40:42 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:40:42 PM	Tube furnace set to 0
10/13/2011	6:41:12 PM	H2 valve closed
10/13/2011	6:41:12 PM	BCl3 valve closed
10/13/2011	6:41:12 PM	PH3 valve closed
10/13/2011	6:41:12 PM	SiCl4 pre valve closed
10/13/2011	6:41:12 PM	SiCl4 post valve closed
10/13/2011	6:41:12 PM	Bypass valve closed
10/13/2011	6:41:12 PM	Bubbler valve closed
10/13/2011	6:41:12 PM	Helium valve opened
10/13/2011	6:41:12 PM	Main Vac valve opened
10/13/2011	6:41:12 PM	Helium MFC set to  20.000000
10/13/2011	6:41:12 PM	H2 MFC set to  0.000000
10/13/2011	6:41:12 PM	BCl3 MFC set to  0.000000
10/13/2011	6:41:12 PM	PHl3 MFC set to  0.000000
10/13/2011	6:41:12 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:41:12 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:41:12 PM	Tube furnace set to 0
10/13/2011	6:41:42 PM	Helium valve closed
10/13/2011	6:41:42 PM	H2 valve closed
10/13/2011	6:41:42 PM	BCl3 valve closed
10/13/2011	6:41:42 PM	PH3 valve closed
10/13/2011	6:41:42 PM	SiCl4 pre valve closed
10/13/2011	6:41:42 PM	SiCl4 post valve closed
10/13/2011	6:41:42 PM	Bypass valve closed
10/13/2011	6:41:42 PM	Bubbler valve closed
10/13/2011	6:41:42 PM	Main Vac valve opened
10/13/2011	6:41:42 PM	Helium MFC set to  0.000000
10/13/2011	6:41:42 PM	H2 MFC set to  0.000000
10/13/2011	6:41:42 PM	BCl3 MFC set to  0.000000
10/13/2011	6:41:42 PM	PHl3 MFC set to  0.000000
10/13/2011	6:41:42 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:41:42 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:41:42 PM	Tube furnace set to 0
10/13/2011	6:42:12 PM	H2 valve closed
10/13/2011	6:42:12 PM	BCl3 valve closed
10/13/2011	6:42:12 PM	PH3 valve closed
10/13/2011	6:42:12 PM	SiCl4 pre valve closed
10/13/2011	6:42:12 PM	SiCl4 post valve closed
10/13/2011	6:42:12 PM	Bypass valve closed
10/13/2011	6:42:12 PM	Bubbler valve closed
10/13/2011	6:42:12 PM	Helium valve opened
10/13/2011	6:42:12 PM	Main Vac valve opened
10/13/2011	6:42:12 PM	Helium MFC set to  20.000000
10/13/2011	6:42:12 PM	H2 MFC set to  0.000000
10/13/2011	6:42:12 PM	BCl3 MFC set to  0.000000
10/13/2011	6:42:12 PM	PHl3 MFC set to  0.000000
10/13/2011	6:42:12 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:42:12 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:42:13 PM	Tube furnace set to 0
10/13/2011	6:42:43 PM	Helium valve closed
10/13/2011	6:42:43 PM	H2 valve closed
10/13/2011	6:42:43 PM	BCl3 valve closed
10/13/2011	6:42:43 PM	PH3 valve closed
10/13/2011	6:42:43 PM	SiCl4 pre valve closed
10/13/2011	6:42:43 PM	SiCl4 post valve closed
10/13/2011	6:42:43 PM	Bypass valve closed
10/13/2011	6:42:43 PM	Bubbler valve closed
10/13/2011	6:42:43 PM	Main Vac valve opened
10/13/2011	6:42:43 PM	Helium MFC set to  0.000000
10/13/2011	6:42:43 PM	H2 MFC set to  0.000000
10/13/2011	6:42:43 PM	BCl3 MFC set to  0.000000
10/13/2011	6:42:43 PM	PHl3 MFC set to  0.000000
10/13/2011	6:42:43 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:42:43 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:42:43 PM	Tube furnace set to 0
10/13/2011	6:43:13 PM	H2 valve closed
10/13/2011	6:43:13 PM	BCl3 valve closed
10/13/2011	6:43:13 PM	PH3 valve closed
10/13/2011	6:43:13 PM	SiCl4 pre valve closed
10/13/2011	6:43:13 PM	SiCl4 post valve closed
10/13/2011	6:43:13 PM	Bypass valve closed
10/13/2011	6:43:13 PM	Bubbler valve closed
10/13/2011	6:43:13 PM	Helium valve opened
10/13/2011	6:43:13 PM	Main Vac valve opened
10/13/2011	6:43:13 PM	Helium MFC set to  20.000000
10/13/2011	6:43:13 PM	H2 MFC set to  0.000000
10/13/2011	6:43:13 PM	BCl3 MFC set to  0.000000
10/13/2011	6:43:13 PM	PHl3 MFC set to  0.000000
10/13/2011	6:43:13 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:43:13 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:43:13 PM	Tube furnace set to 0
10/13/2011	6:43:43 PM	Helium valve closed
10/13/2011	6:43:43 PM	H2 valve closed
10/13/2011	6:43:43 PM	BCl3 valve closed
10/13/2011	6:43:43 PM	PH3 valve closed
10/13/2011	6:43:43 PM	SiCl4 pre valve closed
10/13/2011	6:43:43 PM	SiCl4 post valve closed
10/13/2011	6:43:43 PM	Bypass valve closed
10/13/2011	6:43:43 PM	Bubbler valve closed
10/13/2011	6:43:43 PM	Main Vac valve opened
10/13/2011	6:43:43 PM	Helium MFC set to  0.000000
10/13/2011	6:43:43 PM	H2 MFC set to  0.000000
10/13/2011	6:43:43 PM	BCl3 MFC set to  0.000000
10/13/2011	6:43:43 PM	PHl3 MFC set to  0.000000
10/13/2011	6:43:43 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:43:43 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:43:43 PM	Tube furnace set to 0
10/13/2011	6:44:13 PM	H2 valve closed
10/13/2011	6:44:13 PM	BCl3 valve closed
10/13/2011	6:44:13 PM	PH3 valve closed
10/13/2011	6:44:13 PM	SiCl4 pre valve closed
10/13/2011	6:44:13 PM	SiCl4 post valve closed
10/13/2011	6:44:13 PM	Bypass valve closed
10/13/2011	6:44:13 PM	Bubbler valve closed
10/13/2011	6:44:13 PM	Helium valve opened
10/13/2011	6:44:13 PM	Main Vac valve opened
10/13/2011	6:44:13 PM	Helium MFC set to  20.000000
10/13/2011	6:44:13 PM	H2 MFC set to  0.000000
10/13/2011	6:44:13 PM	BCl3 MFC set to  0.000000
10/13/2011	6:44:13 PM	PHl3 MFC set to  0.000000
10/13/2011	6:44:13 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:44:13 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:44:13 PM	Tube furnace set to 0
10/13/2011	6:44:43 PM	Helium valve closed
10/13/2011	6:44:43 PM	H2 valve closed
10/13/2011	6:44:43 PM	BCl3 valve closed
10/13/2011	6:44:43 PM	PH3 valve closed
10/13/2011	6:44:43 PM	SiCl4 pre valve closed
10/13/2011	6:44:43 PM	SiCl4 post valve closed
10/13/2011	6:44:43 PM	Bypass valve closed
10/13/2011	6:44:43 PM	Bubbler valve closed
10/13/2011	6:44:43 PM	Main Vac valve opened
10/13/2011	6:44:43 PM	Helium MFC set to  0.000000
10/13/2011	6:44:43 PM	H2 MFC set to  0.000000
10/13/2011	6:44:43 PM	BCl3 MFC set to  0.000000
10/13/2011	6:44:43 PM	PHl3 MFC set to  0.000000
10/13/2011	6:44:43 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:44:43 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:44:44 PM	Tube furnace set to 0
10/13/2011	6:45:14 PM	H2 valve closed
10/13/2011	6:45:14 PM	BCl3 valve closed
10/13/2011	6:45:14 PM	PH3 valve closed
10/13/2011	6:45:14 PM	SiCl4 pre valve closed
10/13/2011	6:45:14 PM	SiCl4 post valve closed
10/13/2011	6:45:14 PM	Bypass valve closed
10/13/2011	6:45:14 PM	Bubbler valve closed
10/13/2011	6:45:14 PM	Helium valve opened
10/13/2011	6:45:14 PM	Main Vac valve opened
10/13/2011	6:45:14 PM	Helium MFC set to  20.000000
10/13/2011	6:45:14 PM	H2 MFC set to  0.000000
10/13/2011	6:45:14 PM	BCl3 MFC set to  0.000000
10/13/2011	6:45:14 PM	PHl3 MFC set to  0.000000
10/13/2011	6:45:14 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:45:14 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:45:14 PM	Tube furnace set to 0
10/13/2011	6:45:44 PM	Helium valve closed
10/13/2011	6:45:44 PM	H2 valve closed
10/13/2011	6:45:44 PM	BCl3 valve closed
10/13/2011	6:45:44 PM	PH3 valve closed
10/13/2011	6:45:44 PM	SiCl4 pre valve closed
10/13/2011	6:45:44 PM	SiCl4 post valve closed
10/13/2011	6:45:44 PM	Bypass valve closed
10/13/2011	6:45:44 PM	Bubbler valve closed
10/13/2011	6:45:44 PM	Main Vac valve opened
10/13/2011	6:45:44 PM	Helium MFC set to  0.000000
10/13/2011	6:45:44 PM	H2 MFC set to  0.000000
10/13/2011	6:45:44 PM	BCl3 MFC set to  0.000000
10/13/2011	6:45:44 PM	PHl3 MFC set to  0.000000
10/13/2011	6:45:44 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:45:44 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:45:44 PM	Tube furnace set to 0
10/13/2011	6:46:14 PM	H2 valve closed
10/13/2011	6:46:14 PM	BCl3 valve closed
10/13/2011	6:46:14 PM	PH3 valve closed
10/13/2011	6:46:14 PM	SiCl4 pre valve closed
10/13/2011	6:46:14 PM	SiCl4 post valve closed
10/13/2011	6:46:14 PM	Bypass valve closed
10/13/2011	6:46:14 PM	Bubbler valve closed
10/13/2011	6:46:14 PM	Helium valve opened
10/13/2011	6:46:14 PM	Main Vac valve opened
10/13/2011	6:46:14 PM	Helium MFC set to  20.000000
10/13/2011	6:46:14 PM	H2 MFC set to  0.000000
10/13/2011	6:46:14 PM	BCl3 MFC set to  0.000000
10/13/2011	6:46:14 PM	PHl3 MFC set to  0.000000
10/13/2011	6:46:14 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:46:14 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:46:14 PM	Tube furnace set to 0
10/13/2011	6:46:44 PM	Helium valve closed
10/13/2011	6:46:44 PM	H2 valve closed
10/13/2011	6:46:44 PM	BCl3 valve closed
10/13/2011	6:46:44 PM	PH3 valve closed
10/13/2011	6:46:44 PM	SiCl4 pre valve closed
10/13/2011	6:46:44 PM	SiCl4 post valve closed
10/13/2011	6:46:44 PM	Bypass valve closed
10/13/2011	6:46:44 PM	Bubbler valve closed
10/13/2011	6:46:44 PM	Main Vac valve opened
10/13/2011	6:46:44 PM	Helium MFC set to  0.000000
10/13/2011	6:46:44 PM	H2 MFC set to  0.000000
10/13/2011	6:46:44 PM	BCl3 MFC set to  0.000000
10/13/2011	6:46:44 PM	PHl3 MFC set to  0.000000
10/13/2011	6:46:44 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:46:44 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:46:44 PM	Tube furnace set to 0
10/13/2011	6:47:14 PM	H2 valve closed
10/13/2011	6:47:14 PM	BCl3 valve closed
10/13/2011	6:47:14 PM	PH3 valve closed
10/13/2011	6:47:14 PM	SiCl4 pre valve closed
10/13/2011	6:47:14 PM	SiCl4 post valve closed
10/13/2011	6:47:14 PM	Bypass valve closed
10/13/2011	6:47:14 PM	Bubbler valve closed
10/13/2011	6:47:14 PM	Helium valve opened
10/13/2011	6:47:14 PM	Main Vac valve opened
10/13/2011	6:47:14 PM	Helium MFC set to  20.000000
10/13/2011	6:47:14 PM	H2 MFC set to  0.000000
10/13/2011	6:47:14 PM	BCl3 MFC set to  0.000000
10/13/2011	6:47:14 PM	PHl3 MFC set to  0.000000
10/13/2011	6:47:14 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:47:14 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:47:15 PM	Tube furnace set to 0
10/13/2011	6:47:45 PM	Helium valve closed
10/13/2011	6:47:45 PM	H2 valve closed
10/13/2011	6:47:45 PM	BCl3 valve closed
10/13/2011	6:47:45 PM	PH3 valve closed
10/13/2011	6:47:45 PM	SiCl4 pre valve closed
10/13/2011	6:47:45 PM	SiCl4 post valve closed
10/13/2011	6:47:45 PM	Bypass valve closed
10/13/2011	6:47:45 PM	Bubbler valve closed
10/13/2011	6:47:45 PM	Main Vac valve opened
10/13/2011	6:47:45 PM	Helium MFC set to  0.000000
10/13/2011	6:47:45 PM	H2 MFC set to  0.000000
10/13/2011	6:47:45 PM	BCl3 MFC set to  0.000000
10/13/2011	6:47:45 PM	PHl3 MFC set to  0.000000
10/13/2011	6:47:45 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:47:45 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:47:45 PM	Tube furnace set to 0
10/13/2011	6:48:15 PM	H2 valve closed
10/13/2011	6:48:15 PM	BCl3 valve closed
10/13/2011	6:48:15 PM	PH3 valve closed
10/13/2011	6:48:15 PM	SiCl4 pre valve closed
10/13/2011	6:48:15 PM	SiCl4 post valve closed
10/13/2011	6:48:15 PM	Bypass valve closed
10/13/2011	6:48:15 PM	Bubbler valve closed
10/13/2011	6:48:15 PM	Helium valve opened
10/13/2011	6:48:15 PM	Main Vac valve opened
10/13/2011	6:48:15 PM	Helium MFC set to  20.000000
10/13/2011	6:48:15 PM	H2 MFC set to  0.000000
10/13/2011	6:48:15 PM	BCl3 MFC set to  0.000000
10/13/2011	6:48:15 PM	PHl3 MFC set to  0.000000
10/13/2011	6:48:15 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:48:15 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:48:15 PM	Tube furnace set to 0
10/13/2011	6:48:45 PM	Helium valve closed
10/13/2011	6:48:45 PM	H2 valve closed
10/13/2011	6:48:45 PM	BCl3 valve closed
10/13/2011	6:48:45 PM	PH3 valve closed
10/13/2011	6:48:45 PM	SiCl4 pre valve closed
10/13/2011	6:48:45 PM	SiCl4 post valve closed
10/13/2011	6:48:45 PM	Bypass valve closed
10/13/2011	6:48:45 PM	Bubbler valve closed
10/13/2011	6:48:45 PM	Main Vac valve opened
10/13/2011	6:48:45 PM	Helium MFC set to  0.000000
10/13/2011	6:48:45 PM	H2 MFC set to  0.000000
10/13/2011	6:48:45 PM	BCl3 MFC set to  0.000000
10/13/2011	6:48:45 PM	PHl3 MFC set to  0.000000
10/13/2011	6:48:45 PM	SiCl4 MFC set to  0.000000
10/13/2011	6:48:45 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	6:48:45 PM	Tube furnace set to 0
10/13/2011	6:48:46 PM	Run finished at 6:48 PM
10/13/2011	7:12:23 PM	Main Vac valve closed
10/13/2011	7:12:43 PM	Main Vac valve opened
10/13/2011	7:16:17 PM	Recipe started at 7:16 PM
10/13/2011	7:16:17 PM	H2 valve closed
10/13/2011	7:16:17 PM	BCl3 valve closed
10/13/2011	7:16:17 PM	PH3 valve closed
10/13/2011	7:16:17 PM	SiCl4 pre valve closed
10/13/2011	7:16:17 PM	SiCl4 post valve closed
10/13/2011	7:16:17 PM	Bypass valve closed
10/13/2011	7:16:17 PM	Bubbler valve closed
10/13/2011	7:16:17 PM	Helium valve opened
10/13/2011	7:16:17 PM	Main Vac valve opened
10/13/2011	7:16:17 PM	Helium MFC set to  10.000000
10/13/2011	7:16:17 PM	H2 MFC set to  0.000000
10/13/2011	7:16:17 PM	BCl3 MFC set to  0.000000
10/13/2011	7:16:17 PM	PHl3 MFC set to  0.000000
10/13/2011	7:16:17 PM	SiCl4 MFC set to  0.000000
10/13/2011	7:16:17 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	7:16:17 PM	Tube furnace set to 180
10/13/2011	7:16:47 PM	Helium valve closed
10/13/2011	7:16:47 PM	H2 valve closed
10/13/2011	7:16:47 PM	BCl3 valve closed
10/13/2011	7:16:47 PM	PH3 valve closed
10/13/2011	7:16:47 PM	SiCl4 pre valve closed
10/13/2011	7:16:47 PM	SiCl4 post valve closed
10/13/2011	7:16:47 PM	Bypass valve closed
10/13/2011	7:16:47 PM	Bubbler valve closed
10/13/2011	7:16:47 PM	Main Vac valve opened
10/13/2011	7:16:47 PM	Helium MFC set to  0.000000
10/13/2011	7:16:47 PM	H2 MFC set to  0.000000
10/13/2011	7:16:47 PM	BCl3 MFC set to  0.000000
10/13/2011	7:16:47 PM	PHl3 MFC set to  0.000000
10/13/2011	7:16:47 PM	SiCl4 MFC set to  0.000000
10/13/2011	7:16:47 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	7:16:47 PM	Tube furnace set to 180
10/13/2011	7:17:17 PM	H2 valve closed
10/13/2011	7:17:17 PM	BCl3 valve closed
10/13/2011	7:17:17 PM	PH3 valve closed
10/13/2011	7:17:17 PM	SiCl4 pre valve closed
10/13/2011	7:17:17 PM	SiCl4 post valve closed
10/13/2011	7:17:17 PM	Bypass valve closed
10/13/2011	7:17:17 PM	Bubbler valve closed
10/13/2011	7:17:17 PM	Helium valve opened
10/13/2011	7:17:17 PM	Main Vac valve opened
10/13/2011	7:17:17 PM	Helium MFC set to  10.000000
10/13/2011	7:17:17 PM	H2 MFC set to  0.000000
10/13/2011	7:17:17 PM	BCl3 MFC set to  0.000000
10/13/2011	7:17:17 PM	PHl3 MFC set to  0.000000
10/13/2011	7:17:17 PM	SiCl4 MFC set to  0.000000
10/13/2011	7:17:17 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	7:17:17 PM	Tube furnace set to 180
10/13/2011	7:17:47 PM	Helium valve closed
10/13/2011	7:17:47 PM	H2 valve closed
10/13/2011	7:17:47 PM	BCl3 valve closed
10/13/2011	7:17:47 PM	PH3 valve closed
10/13/2011	7:17:47 PM	SiCl4 pre valve closed
10/13/2011	7:17:47 PM	SiCl4 post valve closed
10/13/2011	7:17:47 PM	Bypass valve closed
10/13/2011	7:17:47 PM	Bubbler valve closed
10/13/2011	7:17:47 PM	Main Vac valve opened
10/13/2011	7:17:47 PM	Helium MFC set to  0.000000
10/13/2011	7:17:47 PM	H2 MFC set to  0.000000
10/13/2011	7:17:47 PM	BCl3 MFC set to  0.000000
10/13/2011	7:17:47 PM	PHl3 MFC set to  0.000000
10/13/2011	7:17:47 PM	SiCl4 MFC set to  0.000000
10/13/2011	7:17:47 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	7:17:47 PM	Tube furnace set to 180
10/13/2011	7:27:47 PM	Helium valve closed
10/13/2011	7:27:47 PM	H2 valve closed
10/13/2011	7:27:47 PM	BCl3 valve closed
10/13/2011	7:27:47 PM	PH3 valve closed
10/13/2011	7:27:47 PM	SiCl4 pre valve closed
10/13/2011	7:27:47 PM	SiCl4 post valve closed
10/13/2011	7:27:47 PM	Main Vac valve closed
10/13/2011	7:27:47 PM	Bypass valve closed
10/13/2011	7:27:47 PM	Bubbler valve closed
10/13/2011	7:27:47 PM	Helium MFC set to  0.000000
10/13/2011	7:27:47 PM	H2 MFC set to  0.000000
10/13/2011	7:27:47 PM	BCl3 MFC set to  0.000000
10/13/2011	7:27:47 PM	PHl3 MFC set to  0.000000
10/13/2011	7:27:47 PM	SiCl4 MFC set to  0.000000
10/13/2011	7:27:47 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	7:27:48 PM	Tube furnace set to 1000
10/13/2011	7:27:49 PM	Helium valve closed
10/13/2011	7:27:49 PM	BCl3 valve closed
10/13/2011	7:27:49 PM	PH3 valve closed
10/13/2011	7:27:49 PM	SiCl4 pre valve closed
10/13/2011	7:27:49 PM	SiCl4 post valve closed
10/13/2011	7:27:49 PM	Main Vac valve closed
10/13/2011	7:27:49 PM	Bypass valve closed
10/13/2011	7:27:49 PM	Bubbler valve closed
10/13/2011	7:27:49 PM	H2 valve opened
10/13/2011	7:27:49 PM	Helium MFC set to  0.000000
10/13/2011	7:27:49 PM	H2 MFC set to  500.000000
10/13/2011	7:27:49 PM	BCl3 MFC set to  0.000000
10/13/2011	7:27:49 PM	PHl3 MFC set to  0.000000
10/13/2011	7:27:49 PM	SiCl4 MFC set to  0.000000
10/13/2011	7:27:49 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	7:27:49 PM	Tube furnace set to 1000
10/13/2011	7:28:52 PM	Helium valve closed
10/13/2011	7:28:52 PM	BCl3 valve closed
10/13/2011	7:28:52 PM	PH3 valve closed
10/13/2011	7:28:52 PM	SiCl4 pre valve closed
10/13/2011	7:28:52 PM	SiCl4 post valve closed
10/13/2011	7:28:52 PM	Main Vac valve closed
10/13/2011	7:28:52 PM	Bypass valve closed
10/13/2011	7:28:52 PM	H2 valve opened
10/13/2011	7:28:52 PM	Bubbler valve opened
10/13/2011	7:28:52 PM	Helium MFC set to  0.000000
10/13/2011	7:28:52 PM	H2 MFC set to  500.000000
10/13/2011	7:28:52 PM	BCl3 MFC set to  0.000000
10/13/2011	7:28:52 PM	PHl3 MFC set to  0.000000
10/13/2011	7:28:52 PM	SiCl4 MFC set to  0.000000
10/13/2011	7:28:52 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	7:28:52 PM	Tube furnace set to 1000
10/13/2011	7:28:53 PM	Helium valve closed
10/13/2011	7:28:53 PM	BCl3 valve closed
10/13/2011	7:28:53 PM	PH3 valve closed
10/13/2011	7:28:53 PM	SiCl4 pre valve closed
10/13/2011	7:28:53 PM	SiCl4 post valve closed
10/13/2011	7:28:53 PM	Main Vac valve closed
10/13/2011	7:28:53 PM	Bypass valve closed
10/13/2011	7:28:53 PM	H2 valve opened
10/13/2011	7:28:53 PM	Bubbler valve opened
10/13/2011	7:28:53 PM	Helium MFC set to  0.000000
10/13/2011	7:28:53 PM	H2 MFC set to  500.000000
10/13/2011	7:28:53 PM	BCl3 MFC set to  0.000000
10/13/2011	7:28:53 PM	PHl3 MFC set to  0.000000
10/13/2011	7:28:53 PM	SiCl4 MFC set to  0.000000
10/13/2011	7:28:53 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	7:28:53 PM	Tube furnace set to 1000
10/13/2011	7:48:53 PM	Helium valve closed
10/13/2011	7:48:53 PM	BCl3 valve closed
10/13/2011	7:48:53 PM	PH3 valve closed
10/13/2011	7:48:53 PM	Main Vac valve closed
10/13/2011	7:48:53 PM	Bypass valve closed
10/13/2011	7:48:53 PM	H2 valve opened
10/13/2011	7:48:53 PM	SiCl4 pre valve opened
10/13/2011	7:48:53 PM	SiCl4 post valve opened
10/13/2011	7:48:54 PM	Bubbler valve opened
10/13/2011	7:48:54 PM	Helium MFC set to  0.000000
10/13/2011	7:48:54 PM	H2 MFC set to  500.000000
10/13/2011	7:48:54 PM	BCl3 MFC set to  0.000000
10/13/2011	7:48:54 PM	PHl3 MFC set to  0.000000
10/13/2011	7:48:54 PM	SiCl4 MFC set to  50.000000
10/13/2011	7:48:54 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	7:48:54 PM	Tube furnace set to 1000
10/13/2011	7:48:54 PM	Helium valve closed
10/13/2011	7:48:54 PM	H2 valve closed
10/13/2011	7:48:54 PM	BCl3 valve closed
10/13/2011	7:48:54 PM	PH3 valve closed
10/13/2011	7:48:54 PM	SiCl4 pre valve closed
10/13/2011	7:48:54 PM	SiCl4 post valve closed
10/13/2011	7:48:54 PM	Main Vac valve closed
10/13/2011	7:48:54 PM	Bubbler valve closed
10/13/2011	7:48:54 PM	Bypass valve closed
10/13/2011	7:48:54 PM	Helium MFC set to  0.000000
10/13/2011	7:48:54 PM	H2 MFC set to  0.000000
10/13/2011	7:48:54 PM	BCl3 MFC set to  0.000000
10/13/2011	7:48:54 PM	PHl3 MFC set to  0.000000
10/13/2011	7:48:54 PM	SiCl4 MFC set to  0.000000
10/13/2011	7:48:54 PM	Bypass solenoid MFC set to  760.000000
10/13/2011	7:48:54 PM	Tube furnace set to 0
10/13/2011	7:48:54 PM	Baratron reads 708.651825 Torr and NaOH valve is open.  Emergency exit.
10/13/2011	8:45:53 PM	Run aborted at 8:45 PM
10/13/2011	8:50:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	8:50:06 PM	Recipe started at 8:50 PM
10/13/2011	8:50:06 PM	Helium valve closed
10/13/2011	8:50:06 PM	H2 valve closed
10/13/2011	8:50:06 PM	BCl3 valve closed
10/13/2011	8:50:06 PM	PH3 valve closed
10/13/2011	8:50:06 PM	SiCl4 pre valve closed
10/13/2011	8:50:06 PM	SiCl4 post valve closed
10/13/2011	8:50:06 PM	Main Vac valve closed
10/13/2011	8:50:06 PM	Bypass valve closed
10/13/2011	8:50:06 PM	Bubbler valve closed
10/13/2011	8:50:06 PM	Helium MFC set to  0.000000
10/13/2011	8:50:06 PM	H2 MFC set to  0.000000
10/13/2011	8:50:06 PM	BCl3 MFC set to  0.000000
10/13/2011	8:50:06 PM	PHl3 MFC set to  0.000000
10/13/2011	8:50:06 PM	SiCl4 MFC set to  0.000000
10/13/2011	8:50:06 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	8:50:06 PM	Tube furnace set to 0
10/13/2011	8:50:09 PM	H2 valve closed
10/13/2011	8:50:09 PM	BCl3 valve closed
10/13/2011	8:50:09 PM	PH3 valve closed
10/13/2011	8:50:09 PM	SiCl4 pre valve closed
10/13/2011	8:50:09 PM	SiCl4 post valve closed
10/13/2011	8:50:09 PM	Main Vac valve closed
10/13/2011	8:50:09 PM	Bypass valve closed
10/13/2011	8:50:09 PM	Bubbler valve closed
10/13/2011	8:50:09 PM	Helium valve opened
10/13/2011	8:50:09 PM	Helium MFC set to  500.000000
10/13/2011	8:50:09 PM	H2 MFC set to  0.000000
10/13/2011	8:50:09 PM	BCl3 MFC set to  0.000000
10/13/2011	8:50:09 PM	PHl3 MFC set to  0.000000
10/13/2011	8:50:09 PM	SiCl4 MFC set to  0.000000
10/13/2011	8:50:09 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	8:50:10 PM	Tube furnace set to 0
10/13/2011	8:50:18 PM	Helium valve closed
10/13/2011	8:50:18 PM	H2 valve closed
10/13/2011	8:50:18 PM	BCl3 valve closed
10/13/2011	8:50:18 PM	PH3 valve closed
10/13/2011	8:50:18 PM	SiCl4 pre valve closed
10/13/2011	8:50:18 PM	SiCl4 post valve closed
10/13/2011	8:50:18 PM	Main Vac valve closed
10/13/2011	8:50:18 PM	Bypass valve closed
10/13/2011	8:50:18 PM	Bubbler valve closed
10/13/2011	8:50:18 PM	Helium MFC set to  0.000000
10/13/2011	8:50:18 PM	H2 MFC set to  0.000000
10/13/2011	8:50:18 PM	BCl3 MFC set to  0.000000
10/13/2011	8:50:18 PM	PHl3 MFC set to  0.000000
10/13/2011	8:50:18 PM	SiCl4 MFC set to  0.000000
10/13/2011	8:50:18 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	8:50:18 PM	Tube furnace set to 0
10/13/2011	8:50:19 PM	Run finished at 8:50 PM
10/13/2011	8:50:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	8:52:45 PM	Helium MFC set to  500.000000
10/13/2011	8:52:47 PM	Helium valve opened
10/13/2011	8:52:52 PM	Bubbler valve opened
10/13/2011	8:53:28 PM	H2 MFC set to  500.000000
10/13/2011	8:53:30 PM	H2 valve opened
10/13/2011	8:53:35 PM	Helium valve closed
10/13/2011	8:53:39 PM	Helium MFC set to  0.000000
10/13/2011	8:54:09 PM	H2 valve closed
10/13/2011	8:54:12 PM	BCl3 MFC set to  0.000000
10/13/2011	8:54:16 PM	H2 MFC set to  0.000000
10/13/2011	8:54:23 PM	Helium MFC set to  500.000000
10/13/2011	8:54:25 PM	Helium valve opened
10/13/2011	8:58:44 PM	Helium valve closed
10/13/2011	8:58:46 PM	Bubbler valve closed
10/13/2011	8:58:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2011	8:58:59 PM	Recipe started at 8:58 PM
10/13/2011	8:58:59 PM	Helium valve closed
10/13/2011	8:58:59 PM	H2 valve closed
10/13/2011	8:58:59 PM	BCl3 valve closed
10/13/2011	8:58:59 PM	PH3 valve closed
10/13/2011	8:58:59 PM	SiCl4 pre valve closed
10/13/2011	8:58:59 PM	SiCl4 post valve closed
10/13/2011	8:58:59 PM	Main Vac valve closed
10/13/2011	8:58:59 PM	Bubbler valve closed
10/13/2011	8:58:59 PM	Bypass valve opened
10/13/2011	8:58:59 PM	Helium MFC set to  0.000000
10/13/2011	8:58:59 PM	H2 MFC set to  0.000000
10/13/2011	8:58:59 PM	BCl3 MFC set to  0.000000
10/13/2011	8:58:59 PM	PHl3 MFC set to  0.000000
10/13/2011	8:58:59 PM	SiCl4 MFC set to  0.000000
10/13/2011	8:58:59 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	8:58:59 PM	Tube furnace set to 0
10/13/2011	8:59:32 PM	Run aborted at 8:59 PM
10/13/2011	8:59:32 PM	Helium valve closed
10/13/2011	8:59:32 PM	H2 valve closed
10/13/2011	8:59:32 PM	BCl3 valve closed
10/13/2011	8:59:32 PM	PH3 valve closed
10/13/2011	8:59:32 PM	SiCl4 pre valve closed
10/13/2011	8:59:32 PM	SiCl4 post valve closed
10/13/2011	8:59:32 PM	Bypass valve closed
10/13/2011	8:59:32 PM	Main Vac valve closed
10/13/2011	8:59:32 PM	Bubbler valve closed
10/13/2011	8:59:32 PM	Helium MFC set to  0.000000
10/13/2011	8:59:32 PM	H2 MFC set to  0.000000
10/13/2011	8:59:32 PM	BCl3 MFC set to  0.000000
10/13/2011	8:59:32 PM	PHl3 MFC set to  0.000000
10/13/2011	8:59:32 PM	SiCl4 MFC set to  0.000000
10/13/2011	8:59:32 PM	Tube furnace set to 0
10/13/2011	8:59:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2011	8:59:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	8:59:35 PM	Recipe started at 8:59 PM
10/13/2011	8:59:35 PM	Helium valve closed
10/13/2011	8:59:35 PM	H2 valve closed
10/13/2011	8:59:35 PM	BCl3 valve closed
10/13/2011	8:59:35 PM	PH3 valve closed
10/13/2011	8:59:35 PM	SiCl4 pre valve closed
10/13/2011	8:59:35 PM	SiCl4 post valve closed
10/13/2011	8:59:35 PM	Main Vac valve closed
10/13/2011	8:59:35 PM	Bypass valve closed
10/13/2011	8:59:35 PM	Bubbler valve closed
10/13/2011	8:59:35 PM	Helium MFC set to  0.000000
10/13/2011	8:59:35 PM	H2 MFC set to  0.000000
10/13/2011	8:59:35 PM	BCl3 MFC set to  0.000000
10/13/2011	8:59:35 PM	PHl3 MFC set to  0.000000
10/13/2011	8:59:35 PM	SiCl4 MFC set to  0.000000
10/13/2011	8:59:35 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	8:59:35 PM	Tube furnace set to 0
10/13/2011	8:59:38 PM	H2 valve closed
10/13/2011	8:59:38 PM	BCl3 valve closed
10/13/2011	8:59:38 PM	PH3 valve closed
10/13/2011	8:59:38 PM	SiCl4 pre valve closed
10/13/2011	8:59:38 PM	SiCl4 post valve closed
10/13/2011	8:59:38 PM	Main Vac valve closed
10/13/2011	8:59:38 PM	Bypass valve closed
10/13/2011	8:59:38 PM	Bubbler valve closed
10/13/2011	8:59:38 PM	Helium valve opened
10/13/2011	8:59:38 PM	Helium MFC set to  500.000000
10/13/2011	8:59:38 PM	H2 MFC set to  0.000000
10/13/2011	8:59:38 PM	BCl3 MFC set to  0.000000
10/13/2011	8:59:38 PM	PHl3 MFC set to  0.000000
10/13/2011	8:59:38 PM	SiCl4 MFC set to  0.000000
10/13/2011	8:59:38 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	8:59:39 PM	Tube furnace set to 0
10/13/2011	9:00:41 PM	Helium valve closed
10/13/2011	9:00:41 PM	H2 valve closed
10/13/2011	9:00:41 PM	BCl3 valve closed
10/13/2011	9:00:41 PM	PH3 valve closed
10/13/2011	9:00:41 PM	SiCl4 pre valve closed
10/13/2011	9:00:41 PM	SiCl4 post valve closed
10/13/2011	9:00:41 PM	Main Vac valve closed
10/13/2011	9:00:41 PM	Bypass valve closed
10/13/2011	9:00:41 PM	Bubbler valve closed
10/13/2011	9:00:41 PM	Helium MFC set to  0.000000
10/13/2011	9:00:41 PM	H2 MFC set to  0.000000
10/13/2011	9:00:41 PM	BCl3 MFC set to  0.000000
10/13/2011	9:00:41 PM	PHl3 MFC set to  0.000000
10/13/2011	9:00:41 PM	SiCl4 MFC set to  0.000000
10/13/2011	9:00:41 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	9:00:41 PM	Tube furnace set to 0
10/13/2011	9:00:42 PM	Run finished at 9:00 PM
10/13/2011	9:00:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2011	9:04:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2011	9:04:16 PM	Recipe started at 9:04 PM
10/13/2011	9:04:16 PM	Helium valve closed
10/13/2011	9:04:16 PM	H2 valve closed
10/13/2011	9:04:16 PM	BCl3 valve closed
10/13/2011	9:04:16 PM	PH3 valve closed
10/13/2011	9:04:16 PM	SiCl4 pre valve closed
10/13/2011	9:04:16 PM	SiCl4 post valve closed
10/13/2011	9:04:16 PM	Main Vac valve closed
10/13/2011	9:04:16 PM	Bubbler valve closed
10/13/2011	9:04:16 PM	Bypass valve opened
10/13/2011	9:04:16 PM	Helium MFC set to  0.000000
10/13/2011	9:04:16 PM	H2 MFC set to  0.000000
10/13/2011	9:04:16 PM	BCl3 MFC set to  0.000000
10/13/2011	9:04:16 PM	PHl3 MFC set to  0.000000
10/13/2011	9:04:16 PM	SiCl4 MFC set to  0.000000
10/13/2011	9:04:16 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	9:04:16 PM	Tube furnace set to 0
10/13/2011	9:05:18 PM	Helium valve closed
10/13/2011	9:05:18 PM	H2 valve closed
10/13/2011	9:05:18 PM	BCl3 valve closed
10/13/2011	9:05:18 PM	PH3 valve closed
10/13/2011	9:05:18 PM	SiCl4 pre valve closed
10/13/2011	9:05:18 PM	SiCl4 post valve closed
10/13/2011	9:05:18 PM	Main Vac valve closed
10/13/2011	9:05:18 PM	Bubbler valve closed
10/13/2011	9:05:18 PM	Bypass valve opened
10/13/2011	9:05:18 PM	Helium MFC set to  0.000000
10/13/2011	9:05:18 PM	H2 MFC set to  0.000000
10/13/2011	9:05:18 PM	BCl3 MFC set to  0.000000
10/13/2011	9:05:18 PM	PHl3 MFC set to  0.000000
10/13/2011	9:05:18 PM	SiCl4 MFC set to  0.000000
10/13/2011	9:05:18 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	9:05:18 PM	Tube furnace set to 0
10/13/2011	9:06:18 PM	Helium valve closed
10/13/2011	9:06:18 PM	H2 valve closed
10/13/2011	9:06:18 PM	BCl3 valve closed
10/13/2011	9:06:18 PM	PH3 valve closed
10/13/2011	9:06:18 PM	SiCl4 pre valve closed
10/13/2011	9:06:18 PM	SiCl4 post valve closed
10/13/2011	9:06:18 PM	Bypass valve closed
10/13/2011	9:06:18 PM	Bubbler valve closed
10/13/2011	9:06:18 PM	Main Vac valve opened
10/13/2011	9:06:18 PM	Helium MFC set to  0.000000
10/13/2011	9:06:18 PM	H2 MFC set to  0.000000
10/13/2011	9:06:18 PM	BCl3 MFC set to  0.000000
10/13/2011	9:06:18 PM	PHl3 MFC set to  0.000000
10/13/2011	9:06:18 PM	SiCl4 MFC set to  0.000000
10/13/2011	9:06:18 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	9:06:18 PM	Tube furnace set to 0
10/13/2011	9:06:19 PM	Run finished at 9:06 PM
10/13/2011	9:06:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2011	10:02:35 PM	Main Vac valve closed
10/13/2011	10:02:47 PM	Main Vac valve opened
10/13/2011	10:03:17 PM	Recipe started at 10:03 PM
10/13/2011	10:03:17 PM	Helium valve closed
10/13/2011	10:03:17 PM	H2 valve closed
10/13/2011	10:03:17 PM	BCl3 valve closed
10/13/2011	10:03:17 PM	PH3 valve closed
10/13/2011	10:03:17 PM	SiCl4 pre valve closed
10/13/2011	10:03:17 PM	SiCl4 post valve closed
10/13/2011	10:03:17 PM	Bypass valve closed
10/13/2011	10:03:17 PM	Bubbler valve closed
10/13/2011	10:03:17 PM	Main Vac valve opened
10/13/2011	10:03:17 PM	Helium MFC set to  0.000000
10/13/2011	10:03:17 PM	H2 MFC set to  0.000000
10/13/2011	10:03:17 PM	BCl3 MFC set to  0.000000
10/13/2011	10:03:17 PM	PHl3 MFC set to  0.000000
10/13/2011	10:03:17 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:03:17 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:03:17 PM	Tube furnace set to 0
10/13/2011	10:03:47 PM	H2 valve closed
10/13/2011	10:03:47 PM	BCl3 valve closed
10/13/2011	10:03:47 PM	PH3 valve closed
10/13/2011	10:03:47 PM	SiCl4 pre valve closed
10/13/2011	10:03:47 PM	SiCl4 post valve closed
10/13/2011	10:03:47 PM	Bypass valve closed
10/13/2011	10:03:47 PM	Bubbler valve closed
10/13/2011	10:03:47 PM	Helium valve opened
10/13/2011	10:03:47 PM	Main Vac valve opened
10/13/2011	10:03:47 PM	Helium MFC set to  20.000000
10/13/2011	10:03:47 PM	H2 MFC set to  0.000000
10/13/2011	10:03:47 PM	BCl3 MFC set to  0.000000
10/13/2011	10:03:47 PM	PHl3 MFC set to  0.000000
10/13/2011	10:03:47 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:03:47 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:03:47 PM	Tube furnace set to 0
10/13/2011	10:04:17 PM	Helium valve closed
10/13/2011	10:04:17 PM	H2 valve closed
10/13/2011	10:04:17 PM	BCl3 valve closed
10/13/2011	10:04:17 PM	PH3 valve closed
10/13/2011	10:04:17 PM	SiCl4 pre valve closed
10/13/2011	10:04:17 PM	SiCl4 post valve closed
10/13/2011	10:04:17 PM	Bypass valve closed
10/13/2011	10:04:17 PM	Bubbler valve closed
10/13/2011	10:04:17 PM	Main Vac valve opened
10/13/2011	10:04:17 PM	Helium MFC set to  0.000000
10/13/2011	10:04:17 PM	H2 MFC set to  0.000000
10/13/2011	10:04:17 PM	BCl3 MFC set to  0.000000
10/13/2011	10:04:17 PM	PHl3 MFC set to  0.000000
10/13/2011	10:04:17 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:04:17 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:04:18 PM	Tube furnace set to 0
10/13/2011	10:04:48 PM	H2 valve closed
10/13/2011	10:04:48 PM	BCl3 valve closed
10/13/2011	10:04:48 PM	PH3 valve closed
10/13/2011	10:04:48 PM	SiCl4 pre valve closed
10/13/2011	10:04:48 PM	SiCl4 post valve closed
10/13/2011	10:04:48 PM	Bypass valve closed
10/13/2011	10:04:48 PM	Bubbler valve closed
10/13/2011	10:04:48 PM	Helium valve opened
10/13/2011	10:04:48 PM	Main Vac valve opened
10/13/2011	10:04:48 PM	Helium MFC set to  20.000000
10/13/2011	10:04:48 PM	H2 MFC set to  0.000000
10/13/2011	10:04:48 PM	BCl3 MFC set to  0.000000
10/13/2011	10:04:48 PM	PHl3 MFC set to  0.000000
10/13/2011	10:04:48 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:04:48 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:04:48 PM	Tube furnace set to 0
10/13/2011	10:05:18 PM	Helium valve closed
10/13/2011	10:05:18 PM	H2 valve closed
10/13/2011	10:05:18 PM	BCl3 valve closed
10/13/2011	10:05:18 PM	PH3 valve closed
10/13/2011	10:05:18 PM	SiCl4 pre valve closed
10/13/2011	10:05:18 PM	SiCl4 post valve closed
10/13/2011	10:05:18 PM	Bypass valve closed
10/13/2011	10:05:18 PM	Bubbler valve closed
10/13/2011	10:05:18 PM	Main Vac valve opened
10/13/2011	10:05:18 PM	Helium MFC set to  0.000000
10/13/2011	10:05:18 PM	H2 MFC set to  0.000000
10/13/2011	10:05:18 PM	BCl3 MFC set to  0.000000
10/13/2011	10:05:18 PM	PHl3 MFC set to  0.000000
10/13/2011	10:05:18 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:05:18 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:05:18 PM	Tube furnace set to 0
10/13/2011	10:05:48 PM	H2 valve closed
10/13/2011	10:05:48 PM	BCl3 valve closed
10/13/2011	10:05:48 PM	PH3 valve closed
10/13/2011	10:05:48 PM	SiCl4 pre valve closed
10/13/2011	10:05:48 PM	SiCl4 post valve closed
10/13/2011	10:05:48 PM	Bypass valve closed
10/13/2011	10:05:48 PM	Bubbler valve closed
10/13/2011	10:05:48 PM	Helium valve opened
10/13/2011	10:05:48 PM	Main Vac valve opened
10/13/2011	10:05:48 PM	Helium MFC set to  20.000000
10/13/2011	10:05:48 PM	H2 MFC set to  0.000000
10/13/2011	10:05:48 PM	BCl3 MFC set to  0.000000
10/13/2011	10:05:48 PM	PHl3 MFC set to  0.000000
10/13/2011	10:05:48 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:05:48 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:05:48 PM	Tube furnace set to 0
10/13/2011	10:06:18 PM	Helium valve closed
10/13/2011	10:06:18 PM	H2 valve closed
10/13/2011	10:06:18 PM	BCl3 valve closed
10/13/2011	10:06:18 PM	PH3 valve closed
10/13/2011	10:06:18 PM	SiCl4 pre valve closed
10/13/2011	10:06:18 PM	SiCl4 post valve closed
10/13/2011	10:06:18 PM	Bypass valve closed
10/13/2011	10:06:18 PM	Bubbler valve closed
10/13/2011	10:06:18 PM	Main Vac valve opened
10/13/2011	10:06:18 PM	Helium MFC set to  0.000000
10/13/2011	10:06:18 PM	H2 MFC set to  0.000000
10/13/2011	10:06:18 PM	BCl3 MFC set to  0.000000
10/13/2011	10:06:18 PM	PHl3 MFC set to  0.000000
10/13/2011	10:06:18 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:06:18 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:06:18 PM	Tube furnace set to 0
10/13/2011	10:06:48 PM	H2 valve closed
10/13/2011	10:06:48 PM	BCl3 valve closed
10/13/2011	10:06:48 PM	PH3 valve closed
10/13/2011	10:06:48 PM	SiCl4 pre valve closed
10/13/2011	10:06:48 PM	SiCl4 post valve closed
10/13/2011	10:06:48 PM	Bypass valve closed
10/13/2011	10:06:48 PM	Bubbler valve closed
10/13/2011	10:06:48 PM	Helium valve opened
10/13/2011	10:06:48 PM	Main Vac valve opened
10/13/2011	10:06:48 PM	Helium MFC set to  20.000000
10/13/2011	10:06:48 PM	H2 MFC set to  0.000000
10/13/2011	10:06:48 PM	BCl3 MFC set to  0.000000
10/13/2011	10:06:48 PM	PHl3 MFC set to  0.000000
10/13/2011	10:06:48 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:06:48 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:06:49 PM	Tube furnace set to 0
10/13/2011	10:07:19 PM	Helium valve closed
10/13/2011	10:07:19 PM	H2 valve closed
10/13/2011	10:07:19 PM	BCl3 valve closed
10/13/2011	10:07:19 PM	PH3 valve closed
10/13/2011	10:07:19 PM	SiCl4 pre valve closed
10/13/2011	10:07:19 PM	SiCl4 post valve closed
10/13/2011	10:07:19 PM	Bypass valve closed
10/13/2011	10:07:19 PM	Bubbler valve closed
10/13/2011	10:07:19 PM	Main Vac valve opened
10/13/2011	10:07:19 PM	Helium MFC set to  0.000000
10/13/2011	10:07:19 PM	H2 MFC set to  0.000000
10/13/2011	10:07:19 PM	BCl3 MFC set to  0.000000
10/13/2011	10:07:19 PM	PHl3 MFC set to  0.000000
10/13/2011	10:07:19 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:07:19 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:07:19 PM	Tube furnace set to 0
10/13/2011	10:07:49 PM	H2 valve closed
10/13/2011	10:07:49 PM	BCl3 valve closed
10/13/2011	10:07:49 PM	PH3 valve closed
10/13/2011	10:07:49 PM	SiCl4 pre valve closed
10/13/2011	10:07:49 PM	SiCl4 post valve closed
10/13/2011	10:07:49 PM	Bypass valve closed
10/13/2011	10:07:49 PM	Bubbler valve closed
10/13/2011	10:07:49 PM	Helium valve opened
10/13/2011	10:07:49 PM	Main Vac valve opened
10/13/2011	10:07:49 PM	Helium MFC set to  20.000000
10/13/2011	10:07:49 PM	H2 MFC set to  0.000000
10/13/2011	10:07:49 PM	BCl3 MFC set to  0.000000
10/13/2011	10:07:49 PM	PHl3 MFC set to  0.000000
10/13/2011	10:07:49 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:07:49 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:07:49 PM	Tube furnace set to 0
10/13/2011	10:08:19 PM	Helium valve closed
10/13/2011	10:08:19 PM	H2 valve closed
10/13/2011	10:08:19 PM	BCl3 valve closed
10/13/2011	10:08:19 PM	PH3 valve closed
10/13/2011	10:08:19 PM	SiCl4 pre valve closed
10/13/2011	10:08:19 PM	SiCl4 post valve closed
10/13/2011	10:08:19 PM	Bypass valve closed
10/13/2011	10:08:19 PM	Bubbler valve closed
10/13/2011	10:08:19 PM	Main Vac valve opened
10/13/2011	10:08:19 PM	Helium MFC set to  0.000000
10/13/2011	10:08:19 PM	H2 MFC set to  0.000000
10/13/2011	10:08:19 PM	BCl3 MFC set to  0.000000
10/13/2011	10:08:19 PM	PHl3 MFC set to  0.000000
10/13/2011	10:08:19 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:08:19 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:08:19 PM	Tube furnace set to 0
10/13/2011	10:08:49 PM	H2 valve closed
10/13/2011	10:08:49 PM	BCl3 valve closed
10/13/2011	10:08:49 PM	PH3 valve closed
10/13/2011	10:08:49 PM	SiCl4 pre valve closed
10/13/2011	10:08:49 PM	SiCl4 post valve closed
10/13/2011	10:08:49 PM	Bypass valve closed
10/13/2011	10:08:49 PM	Bubbler valve closed
10/13/2011	10:08:49 PM	Helium valve opened
10/13/2011	10:08:49 PM	Main Vac valve opened
10/13/2011	10:08:49 PM	Helium MFC set to  20.000000
10/13/2011	10:08:49 PM	H2 MFC set to  0.000000
10/13/2011	10:08:49 PM	BCl3 MFC set to  0.000000
10/13/2011	10:08:49 PM	PHl3 MFC set to  0.000000
10/13/2011	10:08:49 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:08:49 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:08:49 PM	Tube furnace set to 0
10/13/2011	10:09:19 PM	Helium valve closed
10/13/2011	10:09:19 PM	H2 valve closed
10/13/2011	10:09:19 PM	BCl3 valve closed
10/13/2011	10:09:19 PM	PH3 valve closed
10/13/2011	10:09:19 PM	SiCl4 pre valve closed
10/13/2011	10:09:19 PM	SiCl4 post valve closed
10/13/2011	10:09:19 PM	Bypass valve closed
10/13/2011	10:09:19 PM	Bubbler valve closed
10/13/2011	10:09:19 PM	Main Vac valve opened
10/13/2011	10:09:19 PM	Helium MFC set to  0.000000
10/13/2011	10:09:19 PM	H2 MFC set to  0.000000
10/13/2011	10:09:19 PM	BCl3 MFC set to  0.000000
10/13/2011	10:09:19 PM	PHl3 MFC set to  0.000000
10/13/2011	10:09:19 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:09:19 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:09:20 PM	Tube furnace set to 0
10/13/2011	10:09:50 PM	H2 valve closed
10/13/2011	10:09:50 PM	BCl3 valve closed
10/13/2011	10:09:50 PM	PH3 valve closed
10/13/2011	10:09:50 PM	SiCl4 pre valve closed
10/13/2011	10:09:50 PM	SiCl4 post valve closed
10/13/2011	10:09:50 PM	Bypass valve closed
10/13/2011	10:09:50 PM	Bubbler valve closed
10/13/2011	10:09:50 PM	Helium valve opened
10/13/2011	10:09:50 PM	Main Vac valve opened
10/13/2011	10:09:50 PM	Helium MFC set to  20.000000
10/13/2011	10:09:50 PM	H2 MFC set to  0.000000
10/13/2011	10:09:50 PM	BCl3 MFC set to  0.000000
10/13/2011	10:09:50 PM	PHl3 MFC set to  0.000000
10/13/2011	10:09:50 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:09:50 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:09:50 PM	Tube furnace set to 0
10/13/2011	10:10:20 PM	Helium valve closed
10/13/2011	10:10:20 PM	H2 valve closed
10/13/2011	10:10:20 PM	BCl3 valve closed
10/13/2011	10:10:20 PM	PH3 valve closed
10/13/2011	10:10:20 PM	SiCl4 pre valve closed
10/13/2011	10:10:20 PM	SiCl4 post valve closed
10/13/2011	10:10:20 PM	Bypass valve closed
10/13/2011	10:10:20 PM	Bubbler valve closed
10/13/2011	10:10:20 PM	Main Vac valve opened
10/13/2011	10:10:20 PM	Helium MFC set to  0.000000
10/13/2011	10:10:20 PM	H2 MFC set to  0.000000
10/13/2011	10:10:20 PM	BCl3 MFC set to  0.000000
10/13/2011	10:10:20 PM	PHl3 MFC set to  0.000000
10/13/2011	10:10:20 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:10:20 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:10:20 PM	Tube furnace set to 0
10/13/2011	10:10:50 PM	H2 valve closed
10/13/2011	10:10:50 PM	BCl3 valve closed
10/13/2011	10:10:50 PM	PH3 valve closed
10/13/2011	10:10:50 PM	SiCl4 pre valve closed
10/13/2011	10:10:50 PM	SiCl4 post valve closed
10/13/2011	10:10:50 PM	Bypass valve closed
10/13/2011	10:10:50 PM	Bubbler valve closed
10/13/2011	10:10:50 PM	Helium valve opened
10/13/2011	10:10:50 PM	Main Vac valve opened
10/13/2011	10:10:50 PM	Helium MFC set to  20.000000
10/13/2011	10:10:50 PM	H2 MFC set to  0.000000
10/13/2011	10:10:50 PM	BCl3 MFC set to  0.000000
10/13/2011	10:10:50 PM	PHl3 MFC set to  0.000000
10/13/2011	10:10:50 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:10:50 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:10:50 PM	Tube furnace set to 0
10/13/2011	10:11:20 PM	Helium valve closed
10/13/2011	10:11:20 PM	H2 valve closed
10/13/2011	10:11:20 PM	BCl3 valve closed
10/13/2011	10:11:20 PM	PH3 valve closed
10/13/2011	10:11:20 PM	SiCl4 pre valve closed
10/13/2011	10:11:20 PM	SiCl4 post valve closed
10/13/2011	10:11:20 PM	Bypass valve closed
10/13/2011	10:11:20 PM	Bubbler valve closed
10/13/2011	10:11:20 PM	Main Vac valve opened
10/13/2011	10:11:20 PM	Helium MFC set to  0.000000
10/13/2011	10:11:20 PM	H2 MFC set to  0.000000
10/13/2011	10:11:20 PM	BCl3 MFC set to  0.000000
10/13/2011	10:11:20 PM	PHl3 MFC set to  0.000000
10/13/2011	10:11:20 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:11:20 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:11:21 PM	Tube furnace set to 0
10/13/2011	10:11:51 PM	H2 valve closed
10/13/2011	10:11:51 PM	BCl3 valve closed
10/13/2011	10:11:51 PM	PH3 valve closed
10/13/2011	10:11:51 PM	SiCl4 pre valve closed
10/13/2011	10:11:51 PM	SiCl4 post valve closed
10/13/2011	10:11:51 PM	Bypass valve closed
10/13/2011	10:11:51 PM	Bubbler valve closed
10/13/2011	10:11:51 PM	Helium valve opened
10/13/2011	10:11:51 PM	Main Vac valve opened
10/13/2011	10:11:51 PM	Helium MFC set to  20.000000
10/13/2011	10:11:51 PM	H2 MFC set to  0.000000
10/13/2011	10:11:51 PM	BCl3 MFC set to  0.000000
10/13/2011	10:11:51 PM	PHl3 MFC set to  0.000000
10/13/2011	10:11:51 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:11:51 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:11:51 PM	Tube furnace set to 0
10/13/2011	10:12:21 PM	Helium valve closed
10/13/2011	10:12:21 PM	H2 valve closed
10/13/2011	10:12:21 PM	BCl3 valve closed
10/13/2011	10:12:21 PM	PH3 valve closed
10/13/2011	10:12:21 PM	SiCl4 pre valve closed
10/13/2011	10:12:21 PM	SiCl4 post valve closed
10/13/2011	10:12:21 PM	Bypass valve closed
10/13/2011	10:12:21 PM	Bubbler valve closed
10/13/2011	10:12:21 PM	Main Vac valve opened
10/13/2011	10:12:21 PM	Helium MFC set to  0.000000
10/13/2011	10:12:21 PM	H2 MFC set to  0.000000
10/13/2011	10:12:21 PM	BCl3 MFC set to  0.000000
10/13/2011	10:12:21 PM	PHl3 MFC set to  0.000000
10/13/2011	10:12:21 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:12:21 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:12:21 PM	Tube furnace set to 0
10/13/2011	10:12:51 PM	H2 valve closed
10/13/2011	10:12:51 PM	BCl3 valve closed
10/13/2011	10:12:51 PM	PH3 valve closed
10/13/2011	10:12:51 PM	SiCl4 pre valve closed
10/13/2011	10:12:51 PM	SiCl4 post valve closed
10/13/2011	10:12:51 PM	Bypass valve closed
10/13/2011	10:12:51 PM	Bubbler valve closed
10/13/2011	10:12:51 PM	Helium valve opened
10/13/2011	10:12:51 PM	Main Vac valve opened
10/13/2011	10:12:51 PM	Helium MFC set to  20.000000
10/13/2011	10:12:51 PM	H2 MFC set to  0.000000
10/13/2011	10:12:51 PM	BCl3 MFC set to  0.000000
10/13/2011	10:12:51 PM	PHl3 MFC set to  0.000000
10/13/2011	10:12:51 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:12:51 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:12:51 PM	Tube furnace set to 0
10/13/2011	10:13:21 PM	Helium valve closed
10/13/2011	10:13:21 PM	H2 valve closed
10/13/2011	10:13:21 PM	BCl3 valve closed
10/13/2011	10:13:21 PM	PH3 valve closed
10/13/2011	10:13:21 PM	SiCl4 pre valve closed
10/13/2011	10:13:21 PM	SiCl4 post valve closed
10/13/2011	10:13:21 PM	Bypass valve closed
10/13/2011	10:13:21 PM	Bubbler valve closed
10/13/2011	10:13:21 PM	Main Vac valve opened
10/13/2011	10:13:21 PM	Helium MFC set to  0.000000
10/13/2011	10:13:21 PM	H2 MFC set to  0.000000
10/13/2011	10:13:21 PM	BCl3 MFC set to  0.000000
10/13/2011	10:13:21 PM	PHl3 MFC set to  0.000000
10/13/2011	10:13:21 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:13:21 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:13:21 PM	Tube furnace set to 0
10/13/2011	10:13:22 PM	Run finished at 10:13 PM
10/13/2011	10:27:37 PM	Main Vac valve closed
10/13/2011	10:27:55 PM	Main Vac valve opened
10/13/2011	10:27:55 PM	Main Vac valve closed
10/13/2011	10:27:56 PM	Main Vac valve opened
10/13/2011	10:44:02 PM	Main Vac valve closed
10/13/2011	10:44:38 PM	Main Vac valve opened
10/13/2011	10:45:34 PM	Main Vac valve closed
10/13/2011	10:45:42 PM	Main Vac valve opened
10/13/2011	10:49:06 PM	Main Vac valve closed
10/13/2011	10:49:07 PM	Bypass valve opened
10/13/2011	10:49:09 PM	SiCl4 post valve opened
10/13/2011	10:50:06 PM	Bypass valve closed
10/13/2011	10:50:07 PM	Main Vac valve opened
10/13/2011	10:50:16 PM	Main Vac valve closed
10/13/2011	10:50:17 PM	SiCl4 pre valve opened
10/13/2011	10:50:20 PM	SiCl4 MFC set to  50.000000
10/13/2011	10:51:51 PM	Helium valve opened
10/13/2011	10:51:54 PM	Helium MFC set to  500.000000
10/13/2011	10:52:44 PM	Helium valve closed
10/13/2011	10:52:54 PM	Helium MFC set to  0.000000
10/13/2011	10:53:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/13/2011	10:53:22 PM	Recipe started at 10:53 PM
10/13/2011	10:53:22 PM	Helium valve closed
10/13/2011	10:53:22 PM	H2 valve closed
10/13/2011	10:53:22 PM	BCl3 valve closed
10/13/2011	10:53:22 PM	PH3 valve closed
10/13/2011	10:53:22 PM	SiCl4 pre valve closed
10/13/2011	10:53:22 PM	SiCl4 post valve closed
10/13/2011	10:53:22 PM	Main Vac valve closed
10/13/2011	10:53:22 PM	Bypass valve closed
10/13/2011	10:53:22 PM	Bubbler valve closed
10/13/2011	10:53:22 PM	Helium MFC set to  0.000000
10/13/2011	10:53:22 PM	H2 MFC set to  0.000000
10/13/2011	10:53:22 PM	BCl3 MFC set to  0.000000
10/13/2011	10:53:22 PM	PHl3 MFC set to  0.000000
10/13/2011	10:53:22 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:53:22 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:53:22 PM	Tube furnace set to 0
10/13/2011	10:53:23 PM	Run finished at 10:53 PM
10/13/2011	10:53:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/13/2011	10:53:36 PM	Bypass valve opened
10/13/2011	10:54:33 PM	Bypass valve closed
10/13/2011	10:54:34 PM	Main Vac valve opened
10/13/2011	10:55:43 PM	Tube furnace set to 105
10/13/2011	10:56:01 PM	Tube furnace set to 80
10/13/2011	10:56:12 PM	Main Vac valve closed
10/13/2011	10:56:22 PM	Main Vac valve opened
10/13/2011	10:57:27 PM	Recipe started at 10:57 PM
10/13/2011	10:57:27 PM	Helium valve closed
10/13/2011	10:57:27 PM	H2 valve closed
10/13/2011	10:57:27 PM	BCl3 valve closed
10/13/2011	10:57:27 PM	PH3 valve closed
10/13/2011	10:57:27 PM	SiCl4 pre valve closed
10/13/2011	10:57:27 PM	SiCl4 post valve closed
10/13/2011	10:57:27 PM	Bypass valve closed
10/13/2011	10:57:27 PM	Bubbler valve closed
10/13/2011	10:57:27 PM	Main Vac valve opened
10/13/2011	10:57:27 PM	Helium MFC set to  0.000000
10/13/2011	10:57:27 PM	H2 MFC set to  0.000000
10/13/2011	10:57:27 PM	BCl3 MFC set to  0.000000
10/13/2011	10:57:27 PM	PHl3 MFC set to  0.000000
10/13/2011	10:57:27 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:57:27 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:57:27 PM	Tube furnace set to 0
10/13/2011	10:57:57 PM	H2 valve closed
10/13/2011	10:57:57 PM	BCl3 valve closed
10/13/2011	10:57:57 PM	PH3 valve closed
10/13/2011	10:57:57 PM	SiCl4 pre valve closed
10/13/2011	10:57:57 PM	SiCl4 post valve closed
10/13/2011	10:57:57 PM	Bypass valve closed
10/13/2011	10:57:57 PM	Bubbler valve closed
10/13/2011	10:57:57 PM	Helium valve opened
10/13/2011	10:57:57 PM	Main Vac valve opened
10/13/2011	10:57:57 PM	Helium MFC set to  20.000000
10/13/2011	10:57:57 PM	H2 MFC set to  0.000000
10/13/2011	10:57:57 PM	BCl3 MFC set to  0.000000
10/13/2011	10:57:57 PM	PHl3 MFC set to  0.000000
10/13/2011	10:57:57 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:57:57 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:57:57 PM	Tube furnace set to 0
10/13/2011	10:58:27 PM	Helium valve closed
10/13/2011	10:58:27 PM	H2 valve closed
10/13/2011	10:58:27 PM	BCl3 valve closed
10/13/2011	10:58:27 PM	PH3 valve closed
10/13/2011	10:58:27 PM	SiCl4 pre valve closed
10/13/2011	10:58:27 PM	SiCl4 post valve closed
10/13/2011	10:58:27 PM	Bypass valve closed
10/13/2011	10:58:27 PM	Bubbler valve closed
10/13/2011	10:58:27 PM	Main Vac valve opened
10/13/2011	10:58:27 PM	Helium MFC set to  0.000000
10/13/2011	10:58:27 PM	H2 MFC set to  0.000000
10/13/2011	10:58:27 PM	BCl3 MFC set to  0.000000
10/13/2011	10:58:27 PM	PHl3 MFC set to  0.000000
10/13/2011	10:58:27 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:58:27 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:58:27 PM	Tube furnace set to 0
10/13/2011	10:58:57 PM	H2 valve closed
10/13/2011	10:58:57 PM	BCl3 valve closed
10/13/2011	10:58:57 PM	PH3 valve closed
10/13/2011	10:58:57 PM	SiCl4 pre valve closed
10/13/2011	10:58:57 PM	SiCl4 post valve closed
10/13/2011	10:58:57 PM	Bypass valve closed
10/13/2011	10:58:57 PM	Bubbler valve closed
10/13/2011	10:58:57 PM	Helium valve opened
10/13/2011	10:58:57 PM	Main Vac valve opened
10/13/2011	10:58:57 PM	Helium MFC set to  20.000000
10/13/2011	10:58:57 PM	H2 MFC set to  0.000000
10/13/2011	10:58:57 PM	BCl3 MFC set to  0.000000
10/13/2011	10:58:57 PM	PHl3 MFC set to  0.000000
10/13/2011	10:58:57 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:58:57 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:58:57 PM	Tube furnace set to 0
10/13/2011	10:59:27 PM	Helium valve closed
10/13/2011	10:59:27 PM	H2 valve closed
10/13/2011	10:59:27 PM	BCl3 valve closed
10/13/2011	10:59:27 PM	PH3 valve closed
10/13/2011	10:59:27 PM	SiCl4 pre valve closed
10/13/2011	10:59:27 PM	SiCl4 post valve closed
10/13/2011	10:59:27 PM	Bypass valve closed
10/13/2011	10:59:27 PM	Bubbler valve closed
10/13/2011	10:59:27 PM	Main Vac valve opened
10/13/2011	10:59:27 PM	Helium MFC set to  0.000000
10/13/2011	10:59:27 PM	H2 MFC set to  0.000000
10/13/2011	10:59:27 PM	BCl3 MFC set to  0.000000
10/13/2011	10:59:27 PM	PHl3 MFC set to  0.000000
10/13/2011	10:59:27 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:59:27 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:59:28 PM	Tube furnace set to 0
10/13/2011	10:59:58 PM	H2 valve closed
10/13/2011	10:59:58 PM	BCl3 valve closed
10/13/2011	10:59:58 PM	PH3 valve closed
10/13/2011	10:59:58 PM	SiCl4 pre valve closed
10/13/2011	10:59:58 PM	SiCl4 post valve closed
10/13/2011	10:59:58 PM	Bypass valve closed
10/13/2011	10:59:58 PM	Bubbler valve closed
10/13/2011	10:59:58 PM	Helium valve opened
10/13/2011	10:59:58 PM	Main Vac valve opened
10/13/2011	10:59:58 PM	Helium MFC set to  20.000000
10/13/2011	10:59:58 PM	H2 MFC set to  0.000000
10/13/2011	10:59:58 PM	BCl3 MFC set to  0.000000
10/13/2011	10:59:58 PM	PHl3 MFC set to  0.000000
10/13/2011	10:59:58 PM	SiCl4 MFC set to  0.000000
10/13/2011	10:59:58 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	10:59:58 PM	Tube furnace set to 0
10/13/2011	11:00:28 PM	Helium valve closed
10/13/2011	11:00:28 PM	H2 valve closed
10/13/2011	11:00:28 PM	BCl3 valve closed
10/13/2011	11:00:28 PM	PH3 valve closed
10/13/2011	11:00:28 PM	SiCl4 pre valve closed
10/13/2011	11:00:28 PM	SiCl4 post valve closed
10/13/2011	11:00:28 PM	Bypass valve closed
10/13/2011	11:00:28 PM	Bubbler valve closed
10/13/2011	11:00:28 PM	Main Vac valve opened
10/13/2011	11:00:28 PM	Helium MFC set to  0.000000
10/13/2011	11:00:28 PM	H2 MFC set to  0.000000
10/13/2011	11:00:28 PM	BCl3 MFC set to  0.000000
10/13/2011	11:00:28 PM	PHl3 MFC set to  0.000000
10/13/2011	11:00:28 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:00:28 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:00:28 PM	Tube furnace set to 0
10/13/2011	11:00:58 PM	H2 valve closed
10/13/2011	11:00:58 PM	BCl3 valve closed
10/13/2011	11:00:58 PM	PH3 valve closed
10/13/2011	11:00:58 PM	SiCl4 pre valve closed
10/13/2011	11:00:58 PM	SiCl4 post valve closed
10/13/2011	11:00:58 PM	Bypass valve closed
10/13/2011	11:00:58 PM	Bubbler valve closed
10/13/2011	11:00:58 PM	Helium valve opened
10/13/2011	11:00:58 PM	Main Vac valve opened
10/13/2011	11:00:58 PM	Helium MFC set to  20.000000
10/13/2011	11:00:58 PM	H2 MFC set to  0.000000
10/13/2011	11:00:58 PM	BCl3 MFC set to  0.000000
10/13/2011	11:00:58 PM	PHl3 MFC set to  0.000000
10/13/2011	11:00:58 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:00:58 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:00:58 PM	Tube furnace set to 0
10/13/2011	11:01:28 PM	Helium valve closed
10/13/2011	11:01:28 PM	H2 valve closed
10/13/2011	11:01:28 PM	BCl3 valve closed
10/13/2011	11:01:28 PM	PH3 valve closed
10/13/2011	11:01:28 PM	SiCl4 pre valve closed
10/13/2011	11:01:28 PM	SiCl4 post valve closed
10/13/2011	11:01:28 PM	Bypass valve closed
10/13/2011	11:01:28 PM	Bubbler valve closed
10/13/2011	11:01:28 PM	Main Vac valve opened
10/13/2011	11:01:28 PM	Helium MFC set to  0.000000
10/13/2011	11:01:28 PM	H2 MFC set to  0.000000
10/13/2011	11:01:28 PM	BCl3 MFC set to  0.000000
10/13/2011	11:01:28 PM	PHl3 MFC set to  0.000000
10/13/2011	11:01:28 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:01:28 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:01:28 PM	Tube furnace set to 0
10/13/2011	11:01:58 PM	H2 valve closed
10/13/2011	11:01:58 PM	BCl3 valve closed
10/13/2011	11:01:58 PM	PH3 valve closed
10/13/2011	11:01:58 PM	SiCl4 pre valve closed
10/13/2011	11:01:58 PM	SiCl4 post valve closed
10/13/2011	11:01:58 PM	Bypass valve closed
10/13/2011	11:01:58 PM	Bubbler valve closed
10/13/2011	11:01:58 PM	Helium valve opened
10/13/2011	11:01:58 PM	Main Vac valve opened
10/13/2011	11:01:58 PM	Helium MFC set to  20.000000
10/13/2011	11:01:58 PM	H2 MFC set to  0.000000
10/13/2011	11:01:58 PM	BCl3 MFC set to  0.000000
10/13/2011	11:01:58 PM	PHl3 MFC set to  0.000000
10/13/2011	11:01:58 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:01:58 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:01:59 PM	Tube furnace set to 0
10/13/2011	11:02:29 PM	Helium valve closed
10/13/2011	11:02:29 PM	H2 valve closed
10/13/2011	11:02:29 PM	BCl3 valve closed
10/13/2011	11:02:29 PM	PH3 valve closed
10/13/2011	11:02:29 PM	SiCl4 pre valve closed
10/13/2011	11:02:29 PM	SiCl4 post valve closed
10/13/2011	11:02:29 PM	Bypass valve closed
10/13/2011	11:02:29 PM	Bubbler valve closed
10/13/2011	11:02:29 PM	Main Vac valve opened
10/13/2011	11:02:29 PM	Helium MFC set to  0.000000
10/13/2011	11:02:29 PM	H2 MFC set to  0.000000
10/13/2011	11:02:29 PM	BCl3 MFC set to  0.000000
10/13/2011	11:02:29 PM	PHl3 MFC set to  0.000000
10/13/2011	11:02:29 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:02:29 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:02:29 PM	Tube furnace set to 0
10/13/2011	11:02:59 PM	H2 valve closed
10/13/2011	11:02:59 PM	BCl3 valve closed
10/13/2011	11:02:59 PM	PH3 valve closed
10/13/2011	11:02:59 PM	SiCl4 pre valve closed
10/13/2011	11:02:59 PM	SiCl4 post valve closed
10/13/2011	11:02:59 PM	Bypass valve closed
10/13/2011	11:02:59 PM	Bubbler valve closed
10/13/2011	11:02:59 PM	Helium valve opened
10/13/2011	11:02:59 PM	Main Vac valve opened
10/13/2011	11:02:59 PM	Helium MFC set to  20.000000
10/13/2011	11:02:59 PM	H2 MFC set to  0.000000
10/13/2011	11:02:59 PM	BCl3 MFC set to  0.000000
10/13/2011	11:02:59 PM	PHl3 MFC set to  0.000000
10/13/2011	11:02:59 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:02:59 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:02:59 PM	Tube furnace set to 0
10/13/2011	11:03:29 PM	Helium valve closed
10/13/2011	11:03:29 PM	H2 valve closed
10/13/2011	11:03:29 PM	BCl3 valve closed
10/13/2011	11:03:29 PM	PH3 valve closed
10/13/2011	11:03:29 PM	SiCl4 pre valve closed
10/13/2011	11:03:29 PM	SiCl4 post valve closed
10/13/2011	11:03:29 PM	Bypass valve closed
10/13/2011	11:03:29 PM	Bubbler valve closed
10/13/2011	11:03:29 PM	Main Vac valve opened
10/13/2011	11:03:29 PM	Helium MFC set to  0.000000
10/13/2011	11:03:29 PM	H2 MFC set to  0.000000
10/13/2011	11:03:29 PM	BCl3 MFC set to  0.000000
10/13/2011	11:03:29 PM	PHl3 MFC set to  0.000000
10/13/2011	11:03:29 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:03:29 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:03:29 PM	Tube furnace set to 0
10/13/2011	11:03:59 PM	H2 valve closed
10/13/2011	11:03:59 PM	BCl3 valve closed
10/13/2011	11:03:59 PM	PH3 valve closed
10/13/2011	11:03:59 PM	SiCl4 pre valve closed
10/13/2011	11:03:59 PM	SiCl4 post valve closed
10/13/2011	11:03:59 PM	Bypass valve closed
10/13/2011	11:03:59 PM	Bubbler valve closed
10/13/2011	11:03:59 PM	Helium valve opened
10/13/2011	11:03:59 PM	Main Vac valve opened
10/13/2011	11:03:59 PM	Helium MFC set to  20.000000
10/13/2011	11:03:59 PM	H2 MFC set to  0.000000
10/13/2011	11:03:59 PM	BCl3 MFC set to  0.000000
10/13/2011	11:03:59 PM	PHl3 MFC set to  0.000000
10/13/2011	11:03:59 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:03:59 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:03:59 PM	Tube furnace set to 0
10/13/2011	11:04:29 PM	Helium valve closed
10/13/2011	11:04:29 PM	H2 valve closed
10/13/2011	11:04:29 PM	BCl3 valve closed
10/13/2011	11:04:29 PM	PH3 valve closed
10/13/2011	11:04:29 PM	SiCl4 pre valve closed
10/13/2011	11:04:29 PM	SiCl4 post valve closed
10/13/2011	11:04:29 PM	Bypass valve closed
10/13/2011	11:04:29 PM	Bubbler valve closed
10/13/2011	11:04:29 PM	Main Vac valve opened
10/13/2011	11:04:29 PM	Helium MFC set to  0.000000
10/13/2011	11:04:29 PM	H2 MFC set to  0.000000
10/13/2011	11:04:29 PM	BCl3 MFC set to  0.000000
10/13/2011	11:04:29 PM	PHl3 MFC set to  0.000000
10/13/2011	11:04:29 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:04:29 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:04:29 PM	Tube furnace set to 0
10/13/2011	11:05:00 PM	H2 valve closed
10/13/2011	11:05:00 PM	BCl3 valve closed
10/13/2011	11:05:00 PM	PH3 valve closed
10/13/2011	11:05:00 PM	SiCl4 pre valve closed
10/13/2011	11:05:00 PM	SiCl4 post valve closed
10/13/2011	11:05:00 PM	Bypass valve closed
10/13/2011	11:05:00 PM	Bubbler valve closed
10/13/2011	11:05:00 PM	Helium valve opened
10/13/2011	11:05:00 PM	Main Vac valve opened
10/13/2011	11:05:00 PM	Helium MFC set to  20.000000
10/13/2011	11:05:00 PM	H2 MFC set to  0.000000
10/13/2011	11:05:00 PM	BCl3 MFC set to  0.000000
10/13/2011	11:05:00 PM	PHl3 MFC set to  0.000000
10/13/2011	11:05:00 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:05:00 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:05:00 PM	Tube furnace set to 0
10/13/2011	11:05:30 PM	Helium valve closed
10/13/2011	11:05:30 PM	H2 valve closed
10/13/2011	11:05:30 PM	BCl3 valve closed
10/13/2011	11:05:30 PM	PH3 valve closed
10/13/2011	11:05:30 PM	SiCl4 pre valve closed
10/13/2011	11:05:30 PM	SiCl4 post valve closed
10/13/2011	11:05:30 PM	Bypass valve closed
10/13/2011	11:05:30 PM	Bubbler valve closed
10/13/2011	11:05:30 PM	Main Vac valve opened
10/13/2011	11:05:30 PM	Helium MFC set to  0.000000
10/13/2011	11:05:30 PM	H2 MFC set to  0.000000
10/13/2011	11:05:30 PM	BCl3 MFC set to  0.000000
10/13/2011	11:05:30 PM	PHl3 MFC set to  0.000000
10/13/2011	11:05:30 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:05:30 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:05:30 PM	Tube furnace set to 0
10/13/2011	11:06:00 PM	H2 valve closed
10/13/2011	11:06:00 PM	BCl3 valve closed
10/13/2011	11:06:00 PM	PH3 valve closed
10/13/2011	11:06:00 PM	SiCl4 pre valve closed
10/13/2011	11:06:00 PM	SiCl4 post valve closed
10/13/2011	11:06:00 PM	Bypass valve closed
10/13/2011	11:06:00 PM	Bubbler valve closed
10/13/2011	11:06:00 PM	Helium valve opened
10/13/2011	11:06:00 PM	Main Vac valve opened
10/13/2011	11:06:00 PM	Helium MFC set to  20.000000
10/13/2011	11:06:00 PM	H2 MFC set to  0.000000
10/13/2011	11:06:00 PM	BCl3 MFC set to  0.000000
10/13/2011	11:06:00 PM	PHl3 MFC set to  0.000000
10/13/2011	11:06:00 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:06:00 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:06:00 PM	Tube furnace set to 0
10/13/2011	11:06:30 PM	Helium valve closed
10/13/2011	11:06:30 PM	H2 valve closed
10/13/2011	11:06:30 PM	BCl3 valve closed
10/13/2011	11:06:30 PM	PH3 valve closed
10/13/2011	11:06:30 PM	SiCl4 pre valve closed
10/13/2011	11:06:30 PM	SiCl4 post valve closed
10/13/2011	11:06:30 PM	Bypass valve closed
10/13/2011	11:06:30 PM	Bubbler valve closed
10/13/2011	11:06:30 PM	Main Vac valve opened
10/13/2011	11:06:30 PM	Helium MFC set to  0.000000
10/13/2011	11:06:30 PM	H2 MFC set to  0.000000
10/13/2011	11:06:30 PM	BCl3 MFC set to  0.000000
10/13/2011	11:06:30 PM	PHl3 MFC set to  0.000000
10/13/2011	11:06:30 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:06:30 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:06:30 PM	Tube furnace set to 0
10/13/2011	11:07:00 PM	H2 valve closed
10/13/2011	11:07:00 PM	BCl3 valve closed
10/13/2011	11:07:00 PM	PH3 valve closed
10/13/2011	11:07:00 PM	SiCl4 pre valve closed
10/13/2011	11:07:00 PM	SiCl4 post valve closed
10/13/2011	11:07:00 PM	Bypass valve closed
10/13/2011	11:07:00 PM	Bubbler valve closed
10/13/2011	11:07:00 PM	Helium valve opened
10/13/2011	11:07:00 PM	Main Vac valve opened
10/13/2011	11:07:00 PM	Helium MFC set to  20.000000
10/13/2011	11:07:00 PM	H2 MFC set to  0.000000
10/13/2011	11:07:00 PM	BCl3 MFC set to  0.000000
10/13/2011	11:07:00 PM	PHl3 MFC set to  0.000000
10/13/2011	11:07:00 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:07:00 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:07:01 PM	Tube furnace set to 0
10/13/2011	11:07:31 PM	Helium valve closed
10/13/2011	11:07:31 PM	H2 valve closed
10/13/2011	11:07:31 PM	BCl3 valve closed
10/13/2011	11:07:31 PM	PH3 valve closed
10/13/2011	11:07:31 PM	SiCl4 pre valve closed
10/13/2011	11:07:31 PM	SiCl4 post valve closed
10/13/2011	11:07:31 PM	Bypass valve closed
10/13/2011	11:07:31 PM	Bubbler valve closed
10/13/2011	11:07:31 PM	Main Vac valve opened
10/13/2011	11:07:31 PM	Helium MFC set to  0.000000
10/13/2011	11:07:31 PM	H2 MFC set to  0.000000
10/13/2011	11:07:31 PM	BCl3 MFC set to  0.000000
10/13/2011	11:07:31 PM	PHl3 MFC set to  0.000000
10/13/2011	11:07:31 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:07:31 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:07:31 PM	Tube furnace set to 0
10/13/2011	11:07:32 PM	Run finished at 11:07 PM
10/13/2011	11:17:14 PM	Main Vac valve closed
10/13/2011	11:17:24 PM	Main Vac valve opened
10/13/2011	11:18:03 PM	Recipe started at 11:18 PM
10/13/2011	11:18:03 PM	Helium valve closed
10/13/2011	11:18:03 PM	H2 valve closed
10/13/2011	11:18:03 PM	BCl3 valve closed
10/13/2011	11:18:03 PM	PH3 valve closed
10/13/2011	11:18:03 PM	SiCl4 pre valve closed
10/13/2011	11:18:03 PM	SiCl4 post valve closed
10/13/2011	11:18:03 PM	Main Vac valve closed
10/13/2011	11:18:03 PM	Bypass valve closed
10/13/2011	11:18:03 PM	Bubbler valve closed
10/13/2011	11:18:03 PM	Helium MFC set to  0.000000
10/13/2011	11:18:03 PM	H2 MFC set to  0.000000
10/13/2011	11:18:03 PM	BCl3 MFC set to  0.000000
10/13/2011	11:18:03 PM	PHl3 MFC set to  0.000000
10/13/2011	11:18:03 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:18:03 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:18:03 PM	Tube furnace set to 0
10/13/2011	11:18:06 PM	Helium valve closed
10/13/2011	11:18:06 PM	BCl3 valve closed
10/13/2011	11:18:06 PM	PH3 valve closed
10/13/2011	11:18:06 PM	SiCl4 pre valve closed
10/13/2011	11:18:06 PM	SiCl4 post valve closed
10/13/2011	11:18:06 PM	Main Vac valve closed
10/13/2011	11:18:06 PM	Bypass valve closed
10/13/2011	11:18:06 PM	Bubbler valve closed
10/13/2011	11:18:06 PM	H2 valve opened
10/13/2011	11:18:06 PM	Helium MFC set to  0.000000
10/13/2011	11:18:06 PM	H2 MFC set to  500.000000
10/13/2011	11:18:06 PM	BCl3 MFC set to  0.000000
10/13/2011	11:18:06 PM	PHl3 MFC set to  0.000000
10/13/2011	11:18:06 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:18:06 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:18:06 PM	Tube furnace set to 0
10/13/2011	11:19:12 PM	Helium valve closed
10/13/2011	11:19:12 PM	BCl3 valve closed
10/13/2011	11:19:12 PM	PH3 valve closed
10/13/2011	11:19:12 PM	SiCl4 pre valve closed
10/13/2011	11:19:12 PM	SiCl4 post valve closed
10/13/2011	11:19:12 PM	Main Vac valve closed
10/13/2011	11:19:12 PM	Bypass valve closed
10/13/2011	11:19:12 PM	H2 valve opened
10/13/2011	11:19:12 PM	Bubbler valve opened
10/13/2011	11:19:12 PM	Helium MFC set to  0.000000
10/13/2011	11:19:12 PM	H2 MFC set to  500.000000
10/13/2011	11:19:12 PM	BCl3 MFC set to  0.000000
10/13/2011	11:19:12 PM	PHl3 MFC set to  0.000000
10/13/2011	11:19:12 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:19:12 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:19:12 PM	Tube furnace set to 0
10/13/2011	11:19:14 PM	Helium valve closed
10/13/2011	11:19:14 PM	BCl3 valve closed
10/13/2011	11:19:14 PM	PH3 valve closed
10/13/2011	11:19:14 PM	SiCl4 pre valve closed
10/13/2011	11:19:14 PM	SiCl4 post valve closed
10/13/2011	11:19:14 PM	Main Vac valve closed
10/13/2011	11:19:14 PM	Bypass valve closed
10/13/2011	11:19:14 PM	H2 valve opened
10/13/2011	11:19:14 PM	Bubbler valve opened
10/13/2011	11:19:14 PM	Helium MFC set to  0.000000
10/13/2011	11:19:14 PM	H2 MFC set to  500.000000
10/13/2011	11:19:14 PM	BCl3 MFC set to  0.000000
10/13/2011	11:19:14 PM	PHl3 MFC set to  0.000000
10/13/2011	11:19:14 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:19:14 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:19:14 PM	Tube furnace set to 1000
10/13/2011	11:39:14 PM	Helium valve closed
10/13/2011	11:39:14 PM	BCl3 valve closed
10/13/2011	11:39:14 PM	PH3 valve closed
10/13/2011	11:39:14 PM	Main Vac valve closed
10/13/2011	11:39:14 PM	Bypass valve closed
10/13/2011	11:39:14 PM	H2 valve opened
10/13/2011	11:39:14 PM	SiCl4 pre valve opened
10/13/2011	11:39:14 PM	SiCl4 post valve opened
10/13/2011	11:39:14 PM	Bubbler valve opened
10/13/2011	11:39:14 PM	Helium MFC set to  0.000000
10/13/2011	11:39:14 PM	H2 MFC set to  500.000000
10/13/2011	11:39:14 PM	BCl3 MFC set to  0.000000
10/13/2011	11:39:14 PM	PHl3 MFC set to  0.000000
10/13/2011	11:39:14 PM	SiCl4 MFC set to  50.000000
10/13/2011	11:39:14 PM	Bypass solenoid MFC set to  0.000000
10/13/2011	11:39:14 PM	Tube furnace set to 1000
10/13/2011	11:39:14 PM	Helium valve closed
10/13/2011	11:39:14 PM	H2 valve closed
10/13/2011	11:39:14 PM	BCl3 valve closed
10/13/2011	11:39:14 PM	PH3 valve closed
10/13/2011	11:39:14 PM	SiCl4 pre valve closed
10/13/2011	11:39:14 PM	SiCl4 post valve closed
10/13/2011	11:39:14 PM	Main Vac valve closed
10/13/2011	11:39:14 PM	Bubbler valve closed
10/13/2011	11:39:14 PM	Bypass valve closed
10/13/2011	11:39:14 PM	Helium MFC set to  0.000000
10/13/2011	11:39:14 PM	H2 MFC set to  0.000000
10/13/2011	11:39:14 PM	BCl3 MFC set to  0.000000
10/13/2011	11:39:14 PM	PHl3 MFC set to  0.000000
10/13/2011	11:39:14 PM	SiCl4 MFC set to  0.000000
10/13/2011	11:39:14 PM	Bypass solenoid MFC set to  760.000000
10/13/2011	11:39:14 PM	Tube furnace set to 0
10/13/2011	11:39:14 PM	Baratron reads 738.255837 Torr and NaOH valve is open.  Emergency exit.
